Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105423 | Apparatus and methods for beam processing of substrates | — | 2024-10-01 |
| 12007689 | Apparatus and method for spin processing | Steven Gueci | 2024-06-11 |
| 11883837 | System and method for liquid dispense and coverage control | Daniel Fulford, Anton J. deVilliers | 2024-01-30 |
| 11049700 | Atmospheric plasma processing systems and methods for manufacture of microelectronic workpieces | Anton J. deVilliers, Brandon Byrns | 2021-06-29 |
| 10522384 | Electromagnetic wave treatment of a substrate at microwave frequencies using a wave resonator | — | 2019-12-31 |
| 10426001 | Processing system for electromagnetic wave treatment of a substrate at microwave frequencies | Ronald Nasman, Gerrit J. Leusink, Rodney L. Robison, Robert D. Clark | 2019-09-24 |
| 10256121 | Heated stage with variable thermal emissivity method and apparatus | Ronald Nasman | 2019-04-09 |
| 10215704 | Computed tomography using intersecting views of plasma using optical emission spectroscopy during plasma processing | Taejoon Han, Daniel Morvay | 2019-02-26 |
| 8568555 | Method and apparatus for reducing substrate temperature variability | Kenji Suzuki | 2013-10-29 |
| 8435351 | Method and system for measuring a flow rate in a solid precursor delivery system | — | 2013-05-07 |
| 8252114 | Gas distribution system and method for distributing process gas in a processing system | — | 2012-08-28 |
| 8048226 | Method and system for improving deposition uniformity in a vapor deposition system | James Grootegoed | 2011-11-01 |
| 7959775 | Thermal stress-failure-resistant dielectric windows in vacuum processing systems | Ronald Nasman | 2011-06-14 |
| 7691243 | Internal antennae for plasma processing with metal plasma | — | 2010-04-06 |
| 7591232 | Internal coil with segmented shield and inductively-coupled plasma source and processing system therewith | — | 2009-09-22 |
| 7537671 | Self-calibrating optical emission spectroscopy for plasma monitoring | — | 2009-05-26 |
| 7314537 | Method and apparatus for detecting a plasma | Craig T. Baldwin, Carl M. Spearow | 2008-01-01 |
| 7315128 | Magnetically enhanced capacitive plasma source for ionized physical vapor deposition | Derrek Andrew Russell | 2008-01-01 |
| 7255774 | Process apparatus and method for improving plasma production of an inductively coupled plasma | Edward L. Sill | 2007-08-14 |
| 7084573 | Magnetically enhanced capacitive plasma source for ionized physical vapor deposition | Derrek Andrew Russell | 2006-08-01 |
| 6771026 | Plasma generation by mode-conversion of RF-electromagnetic wave to electron cyclotron wave | — | 2004-08-03 |
| 6719886 | Method and apparatus for ionized physical vapor deposition | John Drewery, Glyn Reynolds, Derrek Andrew Russell, Jozef Brcka, Michael Grapperhaus +2 more | 2004-04-13 |
| 6652711 | Inductively-coupled plasma processing system | Jozef Brcka, John Drewery, Michael Grapperhaus, Gerrit J. Leusink, Glyn Reynolds +1 more | 2003-11-25 |
| 6417626 | Immersed inductively—coupled plasma source | Jozef Brcka, John Drewery, Michael Grapperhaus, Gerrit J. Leusink, Glyn Reynolds +1 more | 2002-07-09 |
| 6287435 | Method and apparatus for ionized physical vapor deposition | John Drewery, Glyn Reynolds, Derrek Andrew Russell, Jozef Brcka, Michael Grapperhaus +2 more | 2001-09-11 |