Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7314537 | Method and apparatus for detecting a plasma | Carl M. Spearow, Mirko Vukovic | 2008-01-01 |
| 6596550 | Method for monitoring substrate biasing during plasma processing of a substrate | Edward L. Sill, William Jones | 2003-07-22 |
| 6577113 | Apparatus and method for measuring substrate biasing during plasma processing of a substrate | Edward L. Sill, William Jones | 2003-06-10 |
| 6431112 | Apparatus and method for plasma processing of a substrate utilizing an electrostatic chuck | Edward L. Sill, William Jones | 2002-08-13 |
| 6367413 | Apparatus for monitoring substrate biasing during plasma processing of a substrate | Edward L. Sill, William Jones | 2002-04-09 |