Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7757633 | Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasma | — | 2010-07-20 |
| 7315128 | Magnetically enhanced capacitive plasma source for ionized physical vapor deposition | Mirko Vukovic | 2008-01-01 |
| 7084573 | Magnetically enhanced capacitive plasma source for ionized physical vapor deposition | Mirko Vukovic | 2006-08-01 |
| 7059268 | Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasma | — | 2006-06-13 |
| 6719886 | Method and apparatus for ionized physical vapor deposition | John Drewery, Glyn Reynolds, Jozef Brcka, Mirko Vukovic, Michael Grapperhaus +2 more | 2004-04-13 |
| 6458252 | High target utilization magnetic arrangement for a truncated conical sputtering target | — | 2002-10-01 |
| 6287435 | Method and apparatus for ionized physical vapor deposition | John Drewery, Glyn Reynolds, Jozef Brcka, Mirko Vukovic, Michael Grapperhaus +2 more | 2001-09-11 |
| 6277250 | Dual cathode arrangement for physical vapor deposition of materials onto a round substrate with high aspect ratio features | Mirko Vukovic | 2001-08-21 |