Issued Patents All Time
Showing 25 most recent of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406872 | Semiconductor processing chamber with dual-lift mechanism for edge ring elevation management | James E. Tappan | 2025-09-02 |
| 12368057 | Enhanced closed loop gas based heat exchange | Neil Benjamin | 2025-07-22 |
| 12283463 | Systems and methods for multi-level pulsing in RF plasma tools | Ying Wu, Maolin Long, Vikram Singh | 2025-04-22 |
| 12191122 | Electrostatic chuck with spatially tunable RF coupling to a wafer | — | 2025-01-07 |
| 12165872 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Ying Wu, Qing Xu | 2024-12-10 |
| 12087561 | Vacuum pump protection against deposition byproduct buildup | Tom A. Kamp, Haoquan Yan, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2024-09-10 |
| 12046450 | Synchronization of RF generators | Ying Wu, Alexander Paterson, Xiang Zhou, Zhuoxian Wang, Yoshie Kimura | 2024-07-23 |
| 12040605 | Voltage transient detector and current transient detector | John Pease | 2024-07-16 |
| 12002653 | Systems and methods for compensating for RF power loss | Mathew Evans, Cristofer Addison Flowers | 2024-06-04 |
| 11798785 | Systems for reverse pulsing | Maolin Long, Zhongkui Tan, Ying Wu, Qian Fu, Alex Paterson | 2023-10-24 |
| 11710623 | Vacuum pump protection against deposition byproduct buildup | Tom A. Kamp, Haoquan Yan, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2023-07-25 |
| 11692732 | Air cooled faraday shield and methods for using the same | Saravanapriyan Sriraman, Jon McChesney, Alex Paterson | 2023-07-04 |
| 11676798 | Cooling for a plasma-based reactor | Neil Benjamin | 2023-06-13 |
| 11049726 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Ying Wu, Qing Xu | 2021-06-29 |
| 11031215 | Vacuum pump protection against deposition byproduct buildup | Tom A. Kamp, Haoquan Yan, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2021-06-08 |
| 10957561 | Gas delivery system | Yoshie Kimura, James H. Adams, Yoko Yamaguchi Adams, Tony Zemlock | 2021-03-23 |
| 10950454 | Integrated atomic layer passivation in TCP etch chamber and in-situ etch-ALP method | Xiang Zhou, Tom A. Kamp, Yoshie Kimura, Duming Zhang, Chen Xu +1 more | 2021-03-16 |
| 10943789 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Ying Wu, Qing Xu | 2021-03-09 |
| 10784083 | RF voltage sensor incorporating multiple voltage dividers for detecting RF voltages at a pickup device of a substrate support | Maolin Long, Alex Paterson | 2020-09-22 |
| 10690374 | Air cooled faraday shield and methods for using the same | Saravanapriyan Sriraman, Jon McChesney, Alex Paterson | 2020-06-23 |
| 10679825 | Systems and methods for applying frequency and match tuning in a non-overlapping manner for processing substrate | Ying Wu, Alex Paterson, Arthur H. Sato | 2020-06-09 |
| 10153136 | Hollow RF feed with coaxial DC power feed | Jason Augustino, Alex Paterson, Neil Benjamin | 2018-12-11 |
| 10121641 | Large dynamic range RF voltage sensor and method for voltage mode RF bias application of plasma processing systems | Maolin Long, Alex Paterson | 2018-11-06 |
| 9934956 | Time multiplexed chemical delivery system | — | 2018-04-03 |
| 9885493 | Air cooled faraday shield and methods for using the same | Saravanapriyan Sriraman, Jon McChesney, Alex Paterson | 2018-02-06 |