Issued Patents All Time
Showing 26–50 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824896 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Ying Wu, Qing Xu | 2017-11-21 |
| 9761459 | Systems and methods for reverse pulsing | Maolin Long, Zhongkui Tan, Ying Wu, Qian Fu, Alex Paterson | 2017-09-12 |
| 9607848 | Etch process with pre-etch transient conditioning | Wonchul Lee, Qian Fu | 2017-03-28 |
| 9583357 | Systems and methods for reverse pulsing | Maolin Long, Zhongkui Tan, Ying Wu, Qian Fu, Alex Paterson | 2017-02-28 |
| 9490106 | Internal Faraday shield having distributed chevron patterns and correlated positioning relative to external inner and outer TCP coil | Maolin Long, Alex Paterson | 2016-11-08 |
| 9336901 | Track and hold feedback control of pulsed RF | — | 2016-05-10 |
| 9293353 | Faraday shield having plasma density decoupling structure between TCP coil zones | Maolin Long, Alex Paterson, Ricky Marsh, Ying Wu | 2016-03-22 |
| 9257296 | Etch process with pre-etch transient conditioning | Wonchul Lee, Qian Fu | 2016-02-09 |
| 9142417 | Etch process with pre-etch transient conditioning | Wonchul Lee, Qian Fu | 2015-09-22 |
| 9076831 | Substrate clamping system and method for operating the same | — | 2015-07-07 |
| 8795482 | Selective electrochemical accelerator removal | Steven T. Mayer, Marshall R. Stowell, Richard S. Hill, Timothy M. Archer, Avishai Kepten | 2014-08-05 |
| 8728958 | Gap fill integration | Kaihan Ashtiani, Michael Wood, Naohiro Shoda, Bart van Schravendijk, Lakshminarayana Nittala +1 more | 2014-05-20 |
| 8500985 | Photoresist-free metal deposition | Steven T. Mayer, Eric G. Webb | 2013-08-06 |
| 8268154 | Selective electrochemical accelerator removal | Steven T. Mayer, Richard S. Hill, Timothy M. Archer, Avishai Kepten | 2012-09-18 |
| 7947163 | Photoresist-free metal deposition | Steven T. Mayer, Eric G. Webb | 2011-05-24 |
| 7799200 | Selective electrochemical accelerator removal | Steven T. Mayer, Richard S. Hill, Timothy M. Archer, Avishai Kepten | 2010-09-21 |
| 7695597 | Conductive planarization assembly for electrochemical mechanical planarization of a work piece | Francisco Juarez, Henner Meinhold | 2010-04-13 |
| 7686935 | Pad-assisted electropolishing | Steven T. Mayer, Julia Svirchevski | 2010-03-30 |
| 7682498 | Rotationally asymmetric variable electrode correction | Steven T. Mayer | 2010-03-23 |
| 7560016 | Selectively accelerated plating of metal features | Steven T. Mayer | 2009-07-14 |
| 7531079 | Method and apparatus for uniform electropolishing of damascene IC structures by selective agitation | Steven T. Mayer | 2009-05-12 |
| 7456101 | Method for enhancing the nucleation and morphology of ruthenium films on dielectric substrates using amine containing compounds | Sanjay Gopinath, Jeremie J. Dalton, Jason M. Blackburn, Willibrordus Gerardus Maria van den Hoek | 2008-11-25 |
| 7449098 | Method for planar electroplating | Steven T. Mayer, Jonathan D. Reid, Mark L. Rea, Ismail Emesh, Henner Meinhold | 2008-11-11 |
| 7449099 | Selectively accelerated plating of metal features | Steven T. Mayer | 2008-11-11 |
| 7405163 | Selectively accelerated plating of metal features | Steven T. Mayer | 2008-07-29 |