Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10584415 | Temperature controlled showerhead | Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson, Easwar Srinivasan | 2020-03-10 |
| 10221484 | Temperature controlled showerhead | Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson, Easwar Srinivasan | 2019-03-05 |
| 9476120 | Temperature controlled showerhead | Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson, Easwar Srinivasan | 2016-10-25 |
| 8673080 | Temperature controlled showerhead | Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson, Easwar Srinivasan | 2014-03-18 |
| 8137467 | Temperature controlled showerhead | Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson, Easwar Srinivasan | 2012-03-20 |
| 8100081 | Edge removal of films using externally generated plasma species | Jon Henri, Christopher Gage, Dan M. Doble | 2012-01-24 |
| 8058179 | Atomic layer removal process with higher etch amount | Nerissa Draeger, Harald te Nijenhuis, Bart J. van Schravendijk, Lakshmi Nittala | 2011-11-15 |
| 7695597 | Conductive planarization assembly for electrochemical mechanical planarization of a work piece | John Drewery, Francisco Juarez | 2010-04-13 |
| 7449098 | Method for planar electroplating | Steven T. Mayer, Jonathan D. Reid, Mark L. Rea, Ismail Emesh, John Drewery | 2008-11-11 |
| 7391086 | Conductive contacts and methods for fabricating conductive contacts for elctrochemical planarization of a work piece | John Drewery, Francisco Juarez | 2008-06-24 |
| 7091134 | Deposition of integrated circuit fabrication materials using a print head | Wayne W. Cai, Mark L. Rea, Sachin M. Chinchwadkar | 2006-08-15 |
| 6767403 | Spin bowl having fluid seal for preventing air from flowing into the bowl during spinning | Fred J. Chetcuti | 2004-07-27 |
| 6764168 | Sensor for detecting droplet characteristics | Mark L. Rea, Sachin M. Chinchwadkar, Fred J. Chetcuti, John Drewery | 2004-07-20 |
| 6436843 | System and method for coating substrates using ink jet technology | Fred J. Chetcuti, Judy H. Huang | 2002-08-20 |
| 4879188 | Bypass element for safeguarding battery cells | Botho Ziegenbein, Gunther Petri | 1989-11-07 |
| 4472247 | Method for measuring the oxygen concentration in gas mixtures | Franz-Josef Rohr | 1984-09-18 |
| 4443524 | High-temperature battery | Dieter Hasenauer | 1984-04-17 |
| 4349773 | Circuit for protecting storage cells | Bernd Hartmann | 1982-09-14 |
| 4303877 | Circuit for protecting storage cells | — | 1981-12-01 |
| 4207386 | Electrochemical storage cell | Wilhelm Haar, Wilfried Fischer | 1980-06-10 |
| 4206272 | Electrochemical storage cell | Wilfried Fischer, Wilhelm Haar | 1980-06-03 |