Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12227842 | Vapor accumulator for corrosive gases with purging | Gary Lind, Panya Wongsenakhum, Joshua Collins | 2025-02-18 |
| 10107490 | Configurable liquid precursor vaporizer | Colin F. Smith, Jeffrey E. Lorelli, Edward Sung, Kevin Madrigal, Shawn M. Hamilton +1 more | 2018-10-23 |
| 9847222 | Treatment for flowable dielectric deposition on substrate surfaces | Patrick Reilly, Nerissa Draeger, Bart J. van Schravendijk, Nicholas Muga Ndiege | 2017-12-19 |
| 9728380 | Dual-plenum showerhead with interleaved plenum sub-volumes | Jonathan D. Mohn, Shawn M. Hamilton, Jeffrey E. Lorelli, Kevin Madrigal | 2017-08-08 |
| 9719169 | System and apparatus for flowable deposition in semiconductor fabrication | Jonathan D. Mohn, Shawn M. Hamilton, Kevin Madrigal, Ramkishan Rao Lingampalli | 2017-08-01 |
| 9121097 | Variable showerhead flow by varying internal baffle conductance | Jonathan D. Mohn, Shawn M. Hamilton, Jeffrey E. Lorelli, Kevin Madrigal | 2015-09-01 |
| 8133797 | Protective layer to enable damage free gap fill | Bart J. van Schravendijk, Richard S. Hill, Wilbert van den Hoek | 2012-03-13 |
| 8058179 | Atomic layer removal process with higher etch amount | Nerissa Draeger, Henner Meinhold, Bart J. van Schravendijk, Lakshmi Nittala | 2011-11-15 |
| 7981763 | Atomic layer removal for high aspect ratio gapfill | Bart J. van Schravendijk | 2011-07-19 |
| 6541400 | Process for CVD deposition of fluorinated silicon glass layer on semiconductor wafer | Jason Tian | 2003-04-01 |