Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11270896 | Apparatus for UV flowable dielectric | Nicholas Muga Ndiege, Patrick A. Van Cleemput, David Fang Wei Chen, Wenbo Liang, Shawn M. Hamilton | 2022-03-08 |
| 10388546 | Apparatus for UV flowable dielectric | Nicholas Muga Ndiege, Patrick A. Van Cleemput, David Fang Wei Chen, Wenbo Liang, Shawn M. Hamilton | 2019-08-20 |
| 9916977 | Low k dielectric deposition via UV driven photopolymerization | Patrick A. Van Cleemput, Nicholas Muga Ndiege | 2018-03-13 |
| 9728380 | Dual-plenum showerhead with interleaved plenum sub-volumes | Shawn M. Hamilton, Harald te Nijenhuis, Jeffrey E. Lorelli, Kevin Madrigal | 2017-08-08 |
| 9719169 | System and apparatus for flowable deposition in semiconductor fabrication | Harald te Nijenhuis, Shawn M. Hamilton, Kevin Madrigal, Ramkishan Rao Lingampalli | 2017-08-01 |
| 9184072 | Advanced multi-workpiece processing chamber | Daniel J. Devine, Charles Crapuchettes, Dixit V. Desai, Rene George, Vincent Lee +4 more | 2015-11-10 |
| 9121097 | Variable showerhead flow by varying internal baffle conductance | Shawn M. Hamilton, Harald te Nijenhuis, Jeffrey E. Lorelli, Kevin Madrigal | 2015-09-01 |
| 7972444 | Workpiece support with fluid zones for temperature control | Martin L. Zucker, Daniel J. Devine, Vladimir Nagorny | 2011-07-05 |
| 7369297 | Mirror structure with single crystal silicon cross-member | Brian K. McGinley, Howard Woo | 2008-05-06 |
| 7355781 | Spatial light modulator with perforated hinge | — | 2008-04-08 |
| 7042619 | Mirror structure with single crystal silicon cross-member | Brian K. McGinley, Howard Woo | 2006-05-09 |
| 7011039 | Multi-purpose processing chamber with removable chamber liner | John Joseph Helmsen, Michael Barnes | 2006-03-14 |
| 6598615 | Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber | John Holland, Michael Barnes, Steve S. Y. Mak, Patrick Leahey | 2003-07-29 |
| 6401652 | Plasma reactor inductive coil antenna with flat surface facing the plasma | Arthur H. Sato, Kien N. Chuc | 2002-06-11 |
| 6379575 | Treatment of etching chambers using activated cleaning gas | Gerald Yin, Xue-Yu Qian, Patrick Leahey, Waiching Chow, Arthur Y. Chen +2 more | 2002-04-30 |
| 6095084 | High density plasma process chamber | Shamouil Shamouilian, Ananda H. Kumar, Arnold Kholodenko, Dennis S. Grimard, Michael G. Chafin +1 more | 2000-08-01 |