Patents per Year
Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10107490 | Configurable liquid precursor vaporizer | Colin F. Smith, Harald te Nijenhuis, Edward Sung, Kevin Madrigal, Shawn M. Hamilton +1 more | 2018-10-23 | $28,319,000 |
| 9728380 | Dual-plenum showerhead with interleaved plenum sub-volumes | Jonathan D. Mohn, Shawn M. Hamilton, Harald te Nijenhuis, Kevin Madrigal | 2017-08-08 | |
| 9121097 | Variable showerhead flow by varying internal baffle conductance | Jonathan D. Mohn, Shawn M. Hamilton, Harald te Nijenhuis, Kevin Madrigal | 2015-09-01 |