Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10494717 | Anti-transient showerhead | Edward Sung, Shawn M. Hamilton | 2019-12-03 |
| 10107490 | Configurable liquid precursor vaporizer | Harald te Nijenhuis, Jeffrey E. Lorelli, Edward Sung, Kevin Madrigal, Shawn M. Hamilton +1 more | 2018-10-23 |
| 10023959 | Anti-transient showerhead | Edward Sung, Shawn M. Hamilton | 2018-07-17 |
| 9982341 | Modular vaporizer | Alan M. Schoepp, Edward Sung | 2018-05-29 |
| 9863041 | Internally heated porous filter for defect reduction with liquid or solid precursors | Edward Sung, Kevin Madrigal, Shawn M. Hamilton | 2018-01-09 |
| 9758868 | Plasma suppression behind a showerhead through the use of increased pressure | Patrick Breiling, Ramesh Chandrasekharan, Edmund Minshall, Andrew Duvall, Karl Leeser | 2017-09-12 |
| 9605346 | Systems and methods for pressure-based liquid flow control | — | 2017-03-28 |
| 9505671 | Renewable para-xylene from acetic acid | Junming Sun, Changjun Liu, Yong Wang, Kevin Martin, Padmesh Venkitasubramanian | 2016-11-29 |
| 9453614 | Systems and methods for cooling and removing reactants from a substrate processing chamber | — | 2016-09-27 |
| 9212106 | Renewable olefins from a mixture of acetic acid and propionic acid | Junming Sun, Changjun Liu, Yong Wang, Kevin Martin, Padmesh Venkitasubramanian +1 more | 2015-12-15 |
| 8690148 | Utilization of an air amplifier to remove sheets of paper from glass in an automated glass handler | Bruce Krein, Michael Lofstrom | 2014-04-08 |
| 7993457 | Deposition sub-chamber with variable flow | Peter Krotov | 2011-08-09 |
| 7737035 | Dual seal deposition process chamber and process | Gary Lind, William Johanson, Thomas M. Pratt, John Mazzocco | 2010-06-15 |
| 6758591 | Mixing of materials in an integrated circuit manufacturing equipment | Peter Krotov, Randy K. Hall, Sooyun Joh | 2004-07-06 |
| 4925848 | Derivative of codeine useful as an agonist and process for the preparation of it | John Lewis | 1990-05-15 |