Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11270896 | Apparatus for UV flowable dielectric | Jonathan D. Mohn, Nicholas Muga Ndiege, Patrick A. Van Cleemput, David Fang Wei Chen, Wenbo Liang | 2022-03-08 |
| 10494717 | Anti-transient showerhead | Edward Sung, Colin F. Smith | 2019-12-03 |
| 10388546 | Apparatus for UV flowable dielectric | Jonathan D. Mohn, Nicholas Muga Ndiege, Patrick A. Van Cleemput, David Fang Wei Chen, Wenbo Liang | 2019-08-20 |
| 10107490 | Configurable liquid precursor vaporizer | Colin F. Smith, Harald te Nijenhuis, Jeffrey E. Lorelli, Edward Sung, Kevin Madrigal +1 more | 2018-10-23 |
| 10023959 | Anti-transient showerhead | Edward Sung, Colin F. Smith | 2018-07-17 |
| 9863041 | Internally heated porous filter for defect reduction with liquid or solid precursors | Colin F. Smith, Edward Sung, Kevin Madrigal | 2018-01-09 |
| 9728380 | Dual-plenum showerhead with interleaved plenum sub-volumes | Jonathan D. Mohn, Harald te Nijenhuis, Jeffrey E. Lorelli, Kevin Madrigal | 2017-08-08 |
| 9719169 | System and apparatus for flowable deposition in semiconductor fabrication | Jonathan D. Mohn, Harald te Nijenhuis, Kevin Madrigal, Ramkishan Rao Lingampalli | 2017-08-01 |
| 9496159 | Wafer position correction with a dual, side-by-side wafer transfer robot | Damon Tyrone Genetti, Rich Blank, James S. Templeton | 2016-11-15 |
| 9121097 | Variable showerhead flow by varying internal baffle conductance | Jonathan D. Mohn, Harald te Nijenhuis, Jeffrey E. Lorelli, Kevin Madrigal | 2015-09-01 |
| 9002514 | Wafer position correction with a dual, side-by-side wafer transfer robot | Damon Tyrone Genetti, Rich Blank, Sheldon Templeton | 2015-04-07 |
| 8920162 | Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation | Michael Nordin, Chris Gage, Sheldon Templeton | 2014-12-30 |
| 8491248 | Loadlock designs and methods for using same | Chris Gage, Sheldon Templeton, Keith Wood, Damon Tyrone Genetti | 2013-07-23 |
| 8273670 | Load lock design for rapid wafer heating | Michael Rivkin, Ron Powell, Michael Nordin | 2012-09-25 |
| 8052419 | Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation | Michael Nordin, Chris Gage, Sheldon Templeton | 2011-11-08 |
| 8033769 | Loadlock designs and methods for using same | Chris Gage, Sheldon Templeton, Keith Wood, Damon Tyrone Genetti | 2011-10-11 |
| 7960297 | Load lock design for rapid wafer heating | Michael Rivkin, Ron Powell, Michael Nordin | 2011-06-14 |
| 7300082 | Active edge gripping and effector | Theodore W. Rogers, Michael J. Mayo | 2007-11-27 |