Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368029 | Lamellar ceramic structure | Joel Hollingsworth, Karl Leeser | 2025-07-22 |
| 10964545 | Apparatus including metallized-ceramic tubes for radio-frequency and gas delivery | Joel Hollingsworth, Bradley J. Baker | 2021-03-30 |
| 10431467 | Module including metallized ceramic tubes for RF and gas delivery | Joel Hollingsworth, Bradley J. Baker | 2019-10-01 |
| 10400333 | Hybrid ceramic showerhead | Mohamed Sabri, Karl Leeser | 2019-09-03 |
| 10217614 | Ceramic gas distribution plate with embedded electrode | Jeremy Tucker, Tony Kaushal | 2019-02-26 |
| 10147610 | Substrate pedestal module including metallized ceramic tubes for RF and gas delivery | Joel Hollingsworth, Bradley J. Baker | 2018-12-04 |
| 9719169 | System and apparatus for flowable deposition in semiconductor fabrication | Jonathan D. Mohn, Harald te Nijenhuis, Shawn M. Hamilton, Kevin Madrigal | 2017-08-01 |
| 9449795 | Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactor | Mohamed Sabri, Edward Augustyniak, Douglas Keil, Karl Leeser, Cody Barnett | 2016-09-20 |
| 9441296 | Hybrid ceramic showerhead | Mohamed Sabri, Karl Leeser | 2016-09-13 |
| 6632325 | Article for use in a semiconductor processing chamber and method of fabricating same | — | 2003-10-14 |
| 6175485 | Electrostatic chuck and method for fabricating the same | Padmanabhan Krishnaraj, Brian Lue, Shun Wu | 2001-01-16 |
| 5785878 | RF antenna having high temperature, oxidation resistant coating | — | 1998-07-28 |