Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10107490 | Configurable liquid precursor vaporizer | Colin F. Smith, Harald te Nijenhuis, Jeffrey E. Lorelli, Edward Sung, Shawn M. Hamilton +1 more | 2018-10-23 |
| 9863041 | Internally heated porous filter for defect reduction with liquid or solid precursors | Colin F. Smith, Edward Sung, Shawn M. Hamilton | 2018-01-09 |
| 9728380 | Dual-plenum showerhead with interleaved plenum sub-volumes | Jonathan D. Mohn, Shawn M. Hamilton, Harald te Nijenhuis, Jeffrey E. Lorelli | 2017-08-08 |
| 9719169 | System and apparatus for flowable deposition in semiconductor fabrication | Jonathan D. Mohn, Harald te Nijenhuis, Shawn M. Hamilton, Ramkishan Rao Lingampalli | 2017-08-01 |
| 9284644 | Apparatus and method for improving wafer uniformity | Frances Katherine Zelaya, Hsiang-Yun Lee, Kaihan Ashtiani | 2016-03-15 |
| 9121097 | Variable showerhead flow by varying internal baffle conductance | Jonathan D. Mohn, Shawn M. Hamilton, Harald te Nijenhuis, Jeffrey E. Lorelli | 2015-09-01 |