Configurable liquid precursor vaporizer

Assignee

• Lam Research

Inventors

• Colin F. Smith (15 patents)
• Harald te Nijenhuis (10 patents)
• Jeffrey E. Lorelli (3 patents)
• Edward Sung (19 patents)
• Kevin Madrigal (6 patents)
• Shawn M. Hamilton (18 patents)
• Alan M. Schoepp (43 patents)

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