Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12308216 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Karl Leeser | 2025-05-20 |
| 11862435 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Karl Leeser | 2024-01-02 |
| 11621150 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Karl Leeser | 2023-04-04 |
| 10400333 | Hybrid ceramic showerhead | Ramkishan Rao Lingampalli, Karl Leeser | 2019-09-03 |
| 10224182 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Karl Leeser | 2019-03-05 |
| 10173193 | Ammonia radical generator | Karl Leeser | 2019-01-08 |
| 9970108 | Systems and methods for vapor delivery in a substrate processing system | Jun Qian, Hu Kang, Purushottam Kumar, Chloe Baldasseroni, Heather Landis +11 more | 2018-05-15 |
| 9873946 | Multi-station sequential curing of dielectric films | Jason Dirk Haverkamp, Dennis M. Hausmann, Kevin McLaughlin, Krishnan Shrinivasan, Michael Rivkin +1 more | 2018-01-23 |
| 9852901 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Sesha Varadarajan, Shankar Swaminathan, Saangrut Sangplung, Frank L. Pasquale, Ted Minshall +2 more | 2017-12-26 |
| 9637821 | Method for supplying vaporized precursor | Damien Slevin, Brad Laird, Curtis Bailey, Ming Li, Sirish Reddy +2 more | 2017-05-02 |
| 9460915 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Sesha Varadarajan, Shankar Swaminathan, Saangrut Sangplung, Frank L. Pasquale, Ted Minshall +2 more | 2016-10-04 |
| 9449795 | Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactor | Edward Augustyniak, Douglas Keil, Ramkishan Rao Lingampalli, Karl Leeser, Cody Barnett | 2016-09-20 |
| 9441296 | Hybrid ceramic showerhead | Ramkishan Rao Lingampalli, Karl Leeser | 2016-09-13 |
| 8980769 | Multi-station sequential curing of dielectric films | Jason Dirk Haverkamp, Dennis M. Hausmann, Kevin McLaughlin, Krishnan Shrinivasan, Michael Rivkin +1 more | 2015-03-17 |
| 8629068 | Multi-station sequential curing of dielectric films | Krishnan Shrinivasan, Michael Rivkin, Eugene Smargiassi | 2014-01-14 |
| 8628618 | Precursor vapor generation and delivery system with filters and filter monitoring system | Damien Slevin, Brad Laird, Curtis Bailey, Ming Li, Sirish Reddy +2 more | 2014-01-14 |
| 8454750 | Multi-station sequential curing of dielectric films | Krishnan Shrinivasan, Michael Rivkin, Eugene Smargiassi | 2013-06-04 |
| 7863784 | Axial flux permanent magnet machines | Edward Failing Ritz, Jr., John Bales, Tommy Long, J. Lynn Saunders, Ray Nelke | 2011-01-04 |
| 6930433 | Brushless electro-mechanical device | John Bales, Tom Long, J. Lynn Saunders | 2005-08-16 |
| 6496026 | Method of manufacturing and testing an electronic device using a contact device having fingers and a mechanical ground | Tommy Long, J. Lynn Saunders | 2002-12-17 |
| 6091256 | Contact device for making connection to an electronic circuit device | Tom Long, J. Lynn Saunders | 2000-07-18 |
| D427315 | Vital signs monitoring unit | William E. Saltzstein, Scott M. Burkhart, Gregory T. Semler | 2000-06-27 |
| 6046599 | Method and device for making connection | Tommy Long, J. Lynn Saunders | 2000-04-04 |
| D414870 | Vital signs monitor | William E. Saltzstein, Scott M. Burkhart, Gregory T. Semler | 1999-10-05 |
| 5931791 | Medical patient vital signs-monitoring apparatus | William E. Saltzstein, Anthony Peter Dobaj, Eric Baumann | 1999-08-03 |