Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10781516 | Chemical deposition chamber having gas seal | Ramesh Chandrasekharan, Jeremy Tucker | 2020-09-22 |
| 10741365 | Low volume showerhead with porous baffle | Ramesh Chandrasekharan, Shankar Swaminathan, Frank L. Pasquale, Hu Kang, Adrien LaVoie | 2020-08-11 |
| 10378107 | Low volume showerhead with faceplate holes for improved flow uniformity | Ramesh Chandrasekharan, Shankar Swaminathan, Frank L. Pasquale, Hu Kang, Adrien LaVoie +6 more | 2019-08-13 |
| 10323323 | Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition | Ramesh Chandrasekharan, Jennifer O'Loughlin, Shankar Swaminathan, Frank L. Pasquale, Chloe Baldasseroni +1 more | 2019-06-18 |
| 9920844 | Valve manifold deadleg elimination via reentrant flow path | Karl Leeser, Shankar Swaminathan, Frank L. Pasquale, Chloe Baldasseroni, Ted Minshall +1 more | 2018-03-20 |
| 9852901 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Sesha Varadarajan, Shankar Swaminathan, Frank L. Pasquale, Ted Minshall, Adrien LaVoie +2 more | 2017-12-26 |
| 9631276 | Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition | Ramesh Chandrasekharan, Jennifer O'Loughlin, Shankar Swaminathan, Frank L. Pasquale, Chloe Baldasseroni +1 more | 2017-04-25 |
| 9460915 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Sesha Varadarajan, Shankar Swaminathan, Frank L. Pasquale, Ted Minshall, Adrien LaVoie +2 more | 2016-10-04 |