Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10323323 | Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition | Ramesh Chandrasekharan, Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Chloe Baldasseroni +1 more | 2019-06-18 |
| 9631276 | Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition | Ramesh Chandrasekharan, Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Chloe Baldasseroni +1 more | 2017-04-25 |
| 9399228 | Method and apparatus for purging and plasma suppression in a process chamber | Patrick Breiling, Kevin Gerber, Nagraj Shankar, Pramod Subramonium | 2016-07-26 |
| 9028924 | In-situ deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joe Womack, Dong Niu, Keith Fox +5 more | 2015-05-12 |
| 8741394 | In-situ deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joe Womack, Dong Niu, Keith Fox +5 more | 2014-06-03 |
| 8709551 | Smooth silicon-containing films | Keith Fox, Dong Niu, Joe Womack, Mandyam Sriram, George Andrew Antonelli +1 more | 2014-04-29 |
| 8268722 | Interfacial capping layers for interconnects | Jengyi Yu, Hui-Jung Wu, Girish Dixit, Bart J. van Schravendijk, Pramod Subramonium +2 more | 2012-09-18 |
| 8217513 | Remote plasma processing of interface surfaces | George Andrew Antonelli, Tony Xavier, Mandyam Sriram, Bart J. van Schravendijk, Vishwanathan Rangarajan +2 more | 2012-07-10 |
| 8084339 | Remote plasma processing of interface surfaces | George Andrew Antonelli, Tony Xavier, Mandyam Sriram, Bart J. van Schravendijk, Vishwanathan Rangarajan +2 more | 2011-12-27 |
| 7858510 | Interfacial layers for electromigration resistance improvement in damascene interconnects | Ananda Banerji, George Andrew Antonelli, Mandyam Sriram, Bart J. van Schravendijk, Seshasayee Varadarajan | 2010-12-28 |
| 7648899 | Interfacial layers for electromigration resistance improvement in damascene interconnects | Ananda Banerji, George Andrew Antonelli, Mandyam Sriram, Bart J. van Schravendijk, Seshasayee Varadarajan | 2010-01-19 |
| 7223705 | Ambient gas treatment of porous dielectric | Mandyam Sriram | 2007-05-29 |
| 6713873 | Adhesion between dielectric materials | Andrew Ott, Bruce J. Tufts | 2004-03-30 |
| 6645877 | Method of operating a processing chamber having multiple stations | Andrew Ott | 2003-11-11 |
| 6479028 | Rapid synthesis of carbon nanotubes and carbon encapsulated metal nanoparticles by a displacement reaction | Richard B. Kaner, Ching-Hwa Kiang, Charles H. Wallace | 2002-11-12 |