Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161034 | Rapid chamber clean using concurrent in-situ and remote plasma sources | Keith Fox, Jonathan Church, James Lee, Matthew Mudrow | 2018-12-25 |
| 9399228 | Method and apparatus for purging and plasma suppression in a process chamber | Patrick Breiling, Jennifer O'Loughlin, Nagraj Shankar, Pramod Subramonium | 2016-07-26 |
| 8034725 | Method of eliminating small bin defects in high throughput TEOS films | Jon Henri, Xingyuan Tang, Jason Tian, Arul N. Dhas | 2011-10-11 |
| 7704894 | Method of eliminating small bin defects in high throughput TEOS films | Jon Henri, Xingyuan Tang, Jason Tian, Arul N. Dhas | 2010-04-27 |