Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385138 | Plasma-enhanced deposition of film stacks | Jason Dirk Haverkamp, Joseph L. Womack, Dong Niu, Keith Fox, John B. Alexy +5 more | 2025-08-12 |
| 12040180 | Nitride films with improved etch selectivity for 3D NAND integration | Nagraj Shankar, Malay Milan Samantaray, Katsunori Yoshizawa, Bart J. VanSchravendijk | 2024-07-16 |
| 11837441 | Depositing a carbon hardmask by high power pulsed low frequency RF | Matthew Scott Weimer, Ragesh Puthenkovilakam, Rujun Bai, David French | 2023-12-05 |
| 11746420 | PECVD apparatus for in-situ deposition of film stacks | Joseph L. Womack, Dong Niu, Keith Fox | 2023-09-05 |
| 10541117 | Systems and methods for tilting a wafer for achieving deposition uniformity | Shankar Swaminathan, Frank L. Pasquale, Jeongseok Ha, Chloe Baldasseroni | 2020-01-21 |
| 10475627 | Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition | Chengzhu Qi, Yukinori Sakiyama, Bin Luo, Douglas Keil, Chunhai Ji +1 more | 2019-11-12 |
| 10214816 | PECVD apparatus for in-situ deposition of film stacks | Jason Dirk Haverkamp, Joseph L. Womack, Dong Niu, Keith Fox, John B. Alexy +5 more | 2019-02-26 |
| 10043655 | Plasma activated conformal dielectric film deposition | Shankar Swaminathan, Jon Henri, Dennis M. Hausmann, Mandyam Sriram, Vishwanathan Rangarajan +3 more | 2018-08-07 |
| 9633896 | Methods for formation of low-k aluminum-containing etch stop films | Daniel Damjanovic, Nagraj Shankar | 2017-04-25 |
| 9589799 | High selectivity and low stress carbon hardmask by pulsed low frequency RF power | Sirish Reddy, Chunhai Ji, Xinyi Chen | 2017-03-07 |
| 9570274 | Plasma activated conformal dielectric film deposition | Shankar Swaminathan, Jon Henri, Dennis M. Hausmann, Mandyam Sriram, Vishwanathan Rangarajan +3 more | 2017-02-14 |
| 9399228 | Method and apparatus for purging and plasma suppression in a process chamber | Patrick Breiling, Kevin Gerber, Jennifer O'Loughlin, Nagraj Shankar | 2016-07-26 |
| 9240320 | Methods of depositing smooth and conformal ashable hard mask films | Zhiyuan Fang, Shawn Hancock, Mike Pierce, Jon Henri | 2016-01-19 |
| 9153482 | Methods and apparatus for selective deposition of cobalt in semiconductor processing | Thomas Knisley, Nagraj Shankar | 2015-10-06 |
| 9028924 | In-situ deposition of film stacks | Jason Dirk Haverkamp, Joe Womack, Dong Niu, Keith Fox, John B. Alexy +5 more | 2015-05-12 |
| 8999859 | Plasma activated conformal dielectric film deposition | Shankar Swaminathan, Jon Henri, Dennis M. Hausmann, Mandyam Sriram, Vishwanathan Rangarajan +3 more | 2015-04-07 |
| 8962101 | Methods and apparatus for plasma-based deposition | Aaron Bingham, Tim Thomas, Jon Henri, Greg Farhner | 2015-02-24 |
| 8956983 | Conformal doping via plasma activated atomic layer deposition and conformal film deposition | Shankar Swaminathan, Mandyam Sriram, Bart J. van Schravendijk, Adrien LaVoie | 2015-02-17 |
| 8753978 | Metal and silicon containing capping layers for interconnects | Jengyi Yu, Gengwei Jiang, Roey Shaviv, Hui-Jung Wu, Nagraj Shankar | 2014-06-17 |
| 8741394 | In-situ deposition of film stacks | Jason Dirk Haverkamp, Joe Womack, Dong Niu, Keith Fox, John B. Alexy +5 more | 2014-06-03 |
| 8669181 | Diffusion barrier and etch stop films | Yongsik Yu, Zhiyuan Fang, Jon Henri, Elizabeth Apen, Dan Vitkavage | 2014-03-11 |
| 8637411 | Plasma activated conformal dielectric film deposition | Shankar Swaminathan, Jon Henri, Dennis M. Hausmann, Mandyam Sriram, Vishwanathan Rangarajan +3 more | 2014-01-28 |
| 8591659 | Plasma clean method for deposition chamber | Zhiyuan Fang, Jon Henri, Keith Fox | 2013-11-26 |
| 8479683 | Apparatus including a plasma chamber and controller including instructions for forming a boron nitride layer | George Andrew Antonelli, Mandyam Sriram, Vishwanathan Rangarajan | 2013-07-09 |
| 8435608 | Methods of depositing smooth and conformal ashable hard mask films | Zhiyuan Fang, Shawn Hancock, Mike Pierce, Jon Henri | 2013-05-07 |