Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670516 | Metal-containing passivation for high aspect ratio etch | Karthik S. Colinjivadi, Samantha Tan, Shih-Ked Lee, George Matamis, Yang Pan +4 more | 2023-06-06 |
| 11062897 | Metal doped carbon based hard mask removal in semiconductor fabrication | David Cheung, Kirk Ostrowski, Nikkon Ghosh, Karthik S. Colinjivadi, Samantha Tan +2 more | 2021-07-13 |
| 10580690 | Staircase encapsulation in 3D NAND fabrication | Bart J. van Schravendijk, Nagraj Shankar, Bhadri N. Varadarajan | 2020-03-03 |
| 10002787 | Staircase encapsulation in 3D NAND fabrication | Bart J. van Schravendijk, Nagraj Shankar, Bhadri N. Varadarajan | 2018-06-19 |
| 8669181 | Diffusion barrier and etch stop films | Pramod Subramonium, Zhiyuan Fang, Jon Henri, Elizabeth Apen, Dan Vitkavage | 2014-03-11 |
| 8317923 | Protective self-aligned buffer layers for damascene interconnects | Kaushik Chattopadhyay, Bart J. van Schravendijk, Mandyam Sriram | 2012-11-27 |
| 8021486 | Protective self-aligned buffer layers for damascene interconnects | Mandyam Sriram, Roey Shaviv, Kaushik Chattopadhyay, Hui-Jung Wu | 2011-09-20 |
| 7981777 | Methods of depositing stable and hermetic ashable hardmask films | Pramod Subramonium, Zhiyuan Fang, Jon Henri | 2011-07-19 |
| 7968436 | Low-K SiC copper diffusion barrier films | Karen Billington, Xingyuan Tang, Haiying Fu, Michael Carris, William Crew | 2011-06-28 |
| 7915166 | Diffusion barrier and etch stop films | Pramod Subramonium, Zhiyuan Fang, Jon Henri, Elizabeth Apen, Dan Vitkavage | 2011-03-29 |
| 7842604 | Low-k b-doped SiC copper diffusion barrier films | Atul Gupta, Karen Billington, Michael Carris, William Crew, Thomas W. Mountsier | 2010-11-30 |
| 7727880 | Protective self-aligned buffer layers for damascene interconnects | Kaushik Chattopadhyay, Bart J. van Schravendijk, Mandyam Sriram | 2010-06-01 |
| 7704873 | Protective self-aligned buffer layers for damascene interconnects | Mandyam Sriram, Roey Shaviv, Kaushik Chattopadhyay, Hui-Jung Wu | 2010-04-27 |
| 7576006 | Protective self-aligned buffer layers for damascene interconnects | Mandyam Sriram, Roey Shaviv, Kaushik Chattopadhyay, Hui-Jung Wu | 2009-08-18 |
| 7573061 | Low-k SiC copper diffusion barrier films | Karen Billington, Xingyuan Tang, Haiying Fu, Michael Carris, William Crew | 2009-08-11 |
| 7420275 | Boron-doped SIC copper diffusion barrier films | Atul Gupta, Karen Billington, Michael Carris, William Crew, Thomas W. Mountsier | 2008-09-02 |
| 7282438 | Low-k SiC copper diffusion barrier films | Karen Billington, Xingyuan Tang, Haiying Fu, Michael Carris, William Crew | 2007-10-16 |
| 7239017 | Low-k B-doped SiC copper diffusion barrier films | Atul Gupta, Karen Billington, Michael Carris, William Crew, Thomas W. Mountsier | 2007-07-03 |
| 7163889 | Film for copper diffusion barrier | Karen Billington, Robert Hepburn, Michael Carris, William Crew | 2007-01-16 |
| 6967405 | Film for copper diffusion barrier | Karen Billington, Robert Hepburn, Michael Carris, William Crew | 2005-11-22 |