Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9240320 | Methods of depositing smooth and conformal ashable hard mask films | Pramod Subramonium, Shawn Hancock, Mike Pierce, Jon Henri | 2016-01-19 |
| 8669181 | Diffusion barrier and etch stop films | Yongsik Yu, Pramod Subramonium, Jon Henri, Elizabeth Apen, Dan Vitkavage | 2014-03-11 |
| 8591659 | Plasma clean method for deposition chamber | Pramod Subramonium, Jon Henri, Keith Fox | 2013-11-26 |
| 8435608 | Methods of depositing smooth and conformal ashable hard mask films | Pramod Subramonium, Shawn Hancock, Mike Pierce, Jon Henri | 2013-05-07 |
| 8110493 | Pulsed PECVD method for modulating hydrogen content in hard mask | Pramod Subramonium, Jon Henri | 2012-02-07 |
| 7981777 | Methods of depositing stable and hermetic ashable hardmask films | Pramod Subramonium, Yongsik Yu, Jon Henri | 2011-07-19 |
| 7981810 | Methods of depositing highly selective transparent ashable hardmask films | Pramod Subramonium, Jon Henri | 2011-07-19 |
| 7915166 | Diffusion barrier and etch stop films | Yongsik Yu, Pramod Subramonium, Jon Henri, Elizabeth Apen, Dan Vitkavage | 2011-03-29 |
| 7381644 | Pulsed PECVD method for modulating hydrogen content in hard mask | Pramod Subramonium, Jon Henri | 2008-06-03 |