Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9240320 | Methods of depositing smooth and conformal ashable hard mask films | Pramod Subramonium, Zhiyuan Fang, Mike Pierce, Jon Henri | 2016-01-19 |
| 8435608 | Methods of depositing smooth and conformal ashable hard mask films | Pramod Subramonium, Zhiyuan Fang, Mike Pierce, Jon Henri | 2013-05-07 |
| 6319553 | Isolation of incompatible processes in a multi-station processing chamber | Edward J. McInerney, Thomas M. Pratt | 2001-11-20 |
| 6143082 | Isolation of incompatible processes in a multi-station processing chamber | Edward J. McInerney, Thomas M. Pratt | 2000-11-07 |
| 5795824 | Method for nucleation of CVD tungsten films | — | 1998-08-18 |