Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10302553 | Gas exhaust by-product measurement system | Cristian Siladie, Luc Albarede, Yassine Kabouzi, Sassan Roham | 2019-05-28 |
| 9218945 | Magnetron with gradually increasing magnetic field out of turnarounds | Fred J. Chetcuti | 2015-12-22 |
| 8906450 | Cold spray system nozzle | Johannes Vlcek | 2014-12-09 |
| 7757323 | Belt drive washer | Derek Lee Watkins, Scott Dunn, Greg A. Miller, Mark Aaron Weaver | 2010-07-20 |
| 6918824 | Uniform fluid distribution and exhaust system for a chemical-mechanical planarization device | Dave Marquardt, Sooyun Joh, David Cohen | 2005-07-19 |
| 6561796 | Method of semiconductor wafer heating to prevent bowing | Martin M. Barrera, George D. Kamian, Craig L. Stevens | 2003-05-13 |
| 6397861 | Situ plasma clean gas injection | James C. Wing | 2002-06-04 |
| 6319553 | Isolation of incompatible processes in a multi-station processing chamber | Thomas M. Pratt, Shawn Hancock | 2001-11-20 |
| 6277235 | In situ plasma clean gas injection | James C. Wing | 2001-08-21 |
| 6143082 | Isolation of incompatible processes in a multi-station processing chamber | Thomas M. Pratt, Shawn Hancock | 2000-11-07 |
| 5901271 | Process of evaporating a liquid in a cyclone evaporator | Jeffrey C. Benzing, Michael N. Susoeff | 1999-05-04 |
| 5882417 | Apparatus for preventing deposition on frontside peripheral region and edge of wafer in chemical vapor deposition apparatus | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin, Christopher W. Burkhart +1 more | 1999-03-16 |
| 5843233 | Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin, Christopher W. Burkhart +1 more | 1998-12-01 |
| 5653813 | Cyclone evaporator | Jeffrey C. Benzing, Michael N. Susoeff | 1997-08-05 |
| 5397809 | Polyurethane foam of low thermal conductivity and method of preparation | William J. Ward, III, James Day, Monica A. Ferrero-Heredia | 1995-03-14 |
| 5371113 | Polyurethane foam of low thermal conductivity and method of preparation | William J. Ward, III, James Day, Monica A. Ferrero-Heredia | 1994-12-06 |
| 4690746 | Interlayer dielectric process | E. Ronald Dornseif, Norman E. Zetterquist | 1987-09-01 |