Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056322 | Method and apparatus for determining process rate | Yassine Kabouzi, Andrew D. Bailey, III, Jorge Luque, Seonkyung Lee, Thorsten Lill | 2021-07-06 |
| 10930478 | Apparatus with optical cavity for determining process rate | Jagadeeshwari MANNE, Yassine Kabouzi | 2021-02-23 |
| 10903050 | Endpoint sensor based control including adjustment of an edge ring parameter for each substrate processed to maintain etch rate uniformity | Yassine Kabouzi | 2021-01-26 |
| 10784174 | Method and apparatus for determining etch process parameters | Yassine Kabouzi | 2020-09-22 |
| 10504704 | Plasma etching systems and methods using empirical mode decomposition | Yassine Kabouzi, Jorge Luque, Andrew D. Bailey, III | 2019-12-10 |
| 10302553 | Gas exhaust by-product measurement system | Cristian Siladie, Yassine Kabouzi, Edward J. McInerney, Sassan Roham | 2019-05-28 |
| 10249476 | Control of impedance of RF return path | Alexei Marakhtanov, Rajinder Dhindsa, Ken Lucchesi | 2019-04-02 |
| 10157730 | Control of impedance of RF delivery path | Alexei Marakhtanov, Rajinder Dhindsa, Ken Lucchesi | 2018-12-18 |
| 10134569 | Method and apparatus for real-time monitoring of plasma chamber wall condition | Yassine Kabouzi, Jorge Luque | 2018-11-20 |
| 9735069 | Method and apparatus for determining process rate | Yassine Kabouzi, Andrew D. Bailey, III, Jorge Luque, Seonkyung Lee, Thorsten Lill | 2017-08-15 |
| 9548189 | Plasma etching systems and methods using empirical mode decomposition | Yassine Kabouzi, Jorge Luque, Andrew D. Bailey, III | 2017-01-17 |
| 9401264 | Control of impedance of RF delivery path | Alexei Marakhtanov, Rajinder Dhindsa, Ken Lucchesi | 2016-07-26 |
| 9337000 | Control of impedance of RF return path | Alexei Marakhtanov, Rajinder Dhindsa, Ken Lucchesi | 2016-05-10 |
| 9119283 | Chamber matching for power control mode | — | 2015-08-25 |
| 9107284 | Chamber matching using voltage control mode | — | 2015-08-11 |
| 8894804 | Plasma unconfinement sensor and methods thereof | Jean-Paul Booth, Alexei Marakhtanov, Rajinder Dhindsa, Seyed Jafar Jafarian-Tehrani | 2014-11-25 |
| 8618807 | Arrangement for identifying uncontrolled events at the process module level and methods thereof | Vijayakumar C. Venugopal | 2013-12-31 |
| 8473089 | Methods and apparatus for predictive preventive maintenance of processing chambers | Eric A. Pape, Vijayakumar C. Venugopal, Brian Choi | 2013-06-25 |
| 8164353 | RF-biased capacitively-coupled electrostatic (RFB-CCE) probe arrangement for characterizing a film in a plasma processing chamber | Jean-Paul Booth, Jung-Hea Kim, Douglas Keil | 2012-04-24 |