Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360510 | Large spot spectral sensing to control spatial setpoints | Ye Feng, Seonkyung Lee, Rajan Arora | 2025-07-15 |
| 11791189 | Reflectometer to monitor substrate movement | Eric A. Pape, Dmitry Opaits, Jeffrey D. Bonde, Siyuan Tian | 2023-10-17 |
| 11056322 | Method and apparatus for determining process rate | Yassine Kabouzi, Luc Albarede, Andrew D. Bailey, III, Seonkyung Lee, Thorsten Lill | 2021-07-06 |
| 10504704 | Plasma etching systems and methods using empirical mode decomposition | Luc Albarede, Yassine Kabouzi, Andrew D. Bailey, III | 2019-12-10 |
| 10242849 | System and method for detecting a process point in multi-mode pulse processes | Yassine Kabouzi, Andrew D. Bailey, III, Mehmet Derya Tetiker, Ramkumar Subramanian, Yoko Yamaguchi | 2019-03-26 |
| 10224187 | Detecting partial unclamping of a substrate from an ESC of a substrate processing system | Dmitry Opaits, Benny Wu | 2019-03-05 |
| 10134569 | Method and apparatus for real-time monitoring of plasma chamber wall condition | Luc Albarede, Yassine Kabouzi | 2018-11-20 |
| 9941178 | Methods for detecting endpoint for through-silicon via reveal applications | Alan J. Miller, Evelio Sevillano, Andrew D. Bailey, III, Qing Xu | 2018-04-10 |
| 9735069 | Method and apparatus for determining process rate | Yassine Kabouzi, Luc Albarede, Andrew D. Bailey, III, Seonkyung Lee, Thorsten Lill | 2017-08-15 |
| 9640371 | System and method for detecting a process point in multi-mode pulse processes | Yassine Kabouzi, Andrew D. Bailey, III, Mehmet Derya Tetiker, Ramkumar Subramanian, Yoko Yamaguchi | 2017-05-02 |
| 9548189 | Plasma etching systems and methods using empirical mode decomposition | Luc Albarede, Yassine Kabouzi, Andrew D. Bailey, III | 2017-01-17 |
| 9543225 | Systems and methods for detecting endpoint for through-silicon via reveal applications | Alan J. Miller, Evelio Sevillano, Andrew D. Bailey, III, Qing Xu | 2017-01-10 |
| 8492174 | Etch tool process indicator method and apparatus | Keren Jacobs Kanarik, Nicholas Webb | 2013-07-23 |
| 8206996 | Etch tool process indicator method and apparatus | Keren Jacobs Kanarik, Nicholas Webb | 2012-06-26 |
| 8060330 | Method and system for centering wafer on chuck | Robert Griffith O'Neill, Shang-I Chou, Harmeet Singh | 2011-11-15 |
| 7945085 | User interface for wafer data analysis and visualization | — | 2011-05-17 |
| 7738693 | User interface for wafer data analysis and visualization | — | 2010-06-15 |
| 7239737 | User interface for quantifying wafer non-uniformities and graphically explore significance | Andrew D. Bailey, III, Mark Wilcoxson | 2007-07-03 |
| 7018855 | Process controls for improved wafer uniformity using integrated or standalone metrology | Gowri Kota | 2006-03-28 |