| 12360510 |
Large spot spectral sensing to control spatial setpoints |
Ye Feng, Seonkyung Lee, Rajan Arora |
2025-07-15 |
|
| 11791189 |
Reflectometer to monitor substrate movement |
Eric A. Pape, Dmitry Opaits, Jeffrey D. Bonde, Siyuan Tian |
2023-10-17 |
$212,669,000 |
| 11056322 |
Method and apparatus for determining process rate |
Yassine Kabouzi, Luc Albarede, Andrew D. Bailey, III, Seonkyung Lee, Thorsten Lill |
2021-07-06 |
$186,056,000 |
| 10504704 |
Plasma etching systems and methods using empirical mode decomposition |
Luc Albarede, Yassine Kabouzi, Andrew D. Bailey, III |
2019-12-10 |
$109,358,000 |
| 10242849 |
System and method for detecting a process point in multi-mode pulse processes |
Yassine Kabouzi, Andrew D. Bailey, III, Mehmet Derya Tetiker, Ramkumar Subramanian, Yoko Yamaguchi |
2019-03-26 |
$25,605,000 |
| 10224187 |
Detecting partial unclamping of a substrate from an ESC of a substrate processing system |
Dmitry Opaits, Benny Wu |
2019-03-05 |
$33,307,000 |
| 10134569 |
Method and apparatus for real-time monitoring of plasma chamber wall condition |
Luc Albarede, Yassine Kabouzi |
2018-11-20 |
$25,153,000 |
| 9941178 |
Methods for detecting endpoint for through-silicon via reveal applications |
Alan J. Miller, Evelio Sevillano, Andrew D. Bailey, III, Qing Xu |
2018-04-10 |
$61,494,000 |
| 9735069 |
Method and apparatus for determining process rate |
Yassine Kabouzi, Luc Albarede, Andrew D. Bailey, III, Seonkyung Lee, Thorsten Lill |
2017-08-15 |
$27,833,000 |
| 9640371 |
System and method for detecting a process point in multi-mode pulse processes |
Yassine Kabouzi, Andrew D. Bailey, III, Mehmet Derya Tetiker, Ramkumar Subramanian, Yoko Yamaguchi |
2017-05-02 |
$30,081,000 |
| 9548189 |
Plasma etching systems and methods using empirical mode decomposition |
Luc Albarede, Yassine Kabouzi, Andrew D. Bailey, III |
2017-01-17 |
$12,402,000 |
| 9543225 |
Systems and methods for detecting endpoint for through-silicon via reveal applications |
Alan J. Miller, Evelio Sevillano, Andrew D. Bailey, III, Qing Xu |
2017-01-10 |
$16,626,000 |
| 8492174 |
Etch tool process indicator method and apparatus |
Keren Jacobs Kanarik, Nicholas Webb |
2013-07-23 |
$7,904,000 |
| 8206996 |
Etch tool process indicator method and apparatus |
Keren Jacobs Kanarik, Nicholas Webb |
2012-06-26 |
$13,789,000 |
| 8060330 |
Method and system for centering wafer on chuck |
Robert Griffith O'Neill, Shang-I Chou, Harmeet Singh |
2011-11-15 |
$16,163,000 |
| 7945085 |
User interface for wafer data analysis and visualization |
— |
2011-05-17 |
$12,439,000 |
| 7738693 |
User interface for wafer data analysis and visualization |
— |
2010-06-15 |
$9,400,000 |
| 7239737 |
User interface for quantifying wafer non-uniformities and graphically explore significance |
Andrew D. Bailey, III, Mark Wilcoxson |
2007-07-03 |
$27,052,000 |
| 7018855 |
Process controls for improved wafer uniformity using integrated or standalone metrology |
Gowri Kota |
2006-03-28 |
$8,081,000 |
