Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748748 | RF impedance model based fault detection | John C. Valcore, Jr., James Rogers, Peter Muraoka | 2020-08-18 |
| 10128090 | RF impedance model based fault detection | John C. Valcore, Jr., James Rogers, Peter Muraoka | 2018-11-13 |
| 8492174 | Etch tool process indicator method and apparatus | Keren Jacobs Kanarik, Jorge Luque | 2013-07-23 |
| 8206996 | Etch tool process indicator method and apparatus | Keren Jacobs Kanarik, Jorge Luque | 2012-06-26 |
| 7517803 | Silicon parts having reduced metallic impurity concentration for plasma reaction chambers | Daxing Ren, Jerome S. Hubacek | 2009-04-14 |
| 6846726 | Silicon parts having reduced metallic impurity concentration for plasma reaction chambers | Daxing Ren, Jerome S. Hubacek | 2005-01-25 |