| 8789493 |
Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch |
Enrico Magni, Eric H. Lenz, Ren Zhou |
2014-07-29 |
| 8679252 |
Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof |
Hong Shih, G. Grant Peng |
2014-03-25 |
| 7517803 |
Silicon parts having reduced metallic impurity concentration for plasma reaction chambers |
Jerome S. Hubacek, Nicholas Webb |
2009-04-14 |
| 7498269 |
Cleaning methods for silicon electrode assembly surface contamination removal |
Hong Shih |
2009-03-03 |
| 7442114 |
Methods for silicon electrode assembly etch rate and etch uniformity recovery |
Tuochuan Huang, Hong Shih, Catherine Zhou, Chun Yan, Enrico Magni +4 more |
2008-10-28 |
| 7267741 |
Silicon carbide components of semiconductor substrate processing apparatuses treated to remove free-carbon |
— |
2007-09-11 |
| 7247579 |
Cleaning methods for silicon electrode assembly surface contamination removal |
Hong Shih |
2007-07-24 |
| 6846726 |
Silicon parts having reduced metallic impurity concentration for plasma reaction chambers |
Jerome S. Hubacek, Nicholas Webb |
2005-01-25 |
| 6780569 |
Post-development treatment of patterned photoresist to promote cross-linking of polymer chains |
Eric A. Hudson, Reza Sadjadi, Wan-Lin Chen, Douglas Keil, Peter Cirigliano |
2004-08-24 |
