Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12427550 | Methods for removing deposits on the surface of a chamber component | Min Shen, Kenneth Chien, Han-Wei Wang, Stayce Parmer, Rynn Wang | 2025-09-30 |
| 12327738 | Integrated semiconductor part cleaning system | Jenn C. Chow, David W. Groechel, Dorothea Buechel-Rimmel, Han-Wei Wang, Li Wu +1 more | 2025-06-10 |
| 12318868 | Texturizing a surface without bead blasting | Gang Peng, David W. Groechel, Jenn C. Chow, Han-Wei Wang | 2025-06-03 |
| 11776822 | Wet cleaning of electrostatic chuck | Gang Peng, David W. Groechel, Vijay D. Parkhe, Shinnosuke Kawaguchi, David Benjaminson | 2023-10-03 |
| 10857625 | Texturizing a surface without bead blasting | Gang Peng, David W. Groechel, Jenn C. Chow, Han-Wei Wang | 2020-12-08 |
| 10434604 | Texturizing a surface without bead blasting | Gang Peng, David W. Groechel, Jenn C. Chow, Han-Wei Wang | 2019-10-08 |
| 9387521 | Method of wet cleaning aluminum chamber parts | Hong Shih, Fan-Cheung Sze, Brian McMillin, John Daugherty, Yan Fang +2 more | 2016-07-12 |
| 9105676 | Method of removing damaged epoxy from electrostatic chuck | Hong Shih, Yan Fang, Cliff LaCroix, Neal Newton, Rish Chhatre | 2015-08-11 |
| 9082805 | System and method for testing an electrostatic chuck | Hong Shih, Saurabh Ullal, Yan Fang, Jon McChesney | 2015-07-14 |
| 9054148 | Method for performing hot water seal on electrostatic chuck | Hong Shih, David Schaefer, Ambarish Chhatre, John Daugherty, MingHang Wu +1 more | 2015-06-09 |
| 8854451 | Automated bubble detection apparatus and method | Josh Cormier, Fangli Hao, Hong Shih, John Daugherty, Allan K. Ronne +1 more | 2014-10-07 |
| 8545639 | Method of cleaning aluminum plasma chamber parts | Hong Shih, John Daugherty, Dean J. Larson, Armen Avoyan, Jeremy Chang +5 more | 2013-10-01 |
| 8292698 | On-line chamber cleaning using dry ice blasting | Hong Shih, Oana M. Leonte, John Daugherty, Gregory J. Goldspring, Michael C. May | 2012-10-23 |
| 8216388 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Hong Shih, Qian Fu, Raphael Casaes, Duane Outka | 2012-07-10 |
| 8143904 | System and method for testing an electrostatic chuck | Hong Shih, Saurabh Ullal, Yan Fang, Jon McChesney | 2012-03-27 |
| 7976641 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Hong Shih, Qian Fu, Raphael Casaes, Duane Outka | 2011-07-12 |
| 7507670 | Silicon electrode assembly surface decontamination by acidic solution | Hong Shih, Chunhong Zhou | 2009-03-24 |
| 7442114 | Methods for silicon electrode assembly etch rate and etch uniformity recovery | Daxing Ren, Hong Shih, Catherine Zhou, Chun Yan, Enrico Magni +4 more | 2008-10-28 |
| 7052553 | Wet cleaning of electrostatic chucks | Hong Shih, Catherine Zhou, Bruno Morel, Brian McMillin, Paul Mulgrew +1 more | 2006-05-30 |