Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327738 | Integrated semiconductor part cleaning system | Jenn C. Chow, David W. Groechel, Tuochuan Huang, Han-Wei Wang, Li Wu +1 more | 2025-06-10 |
| 12131934 | Semiconductor substrate support leveling apparatus | Katherine Woo, Paul Brillhart, Jian Li, Shinnosuke Kawaguchi, David W. Groechel +4 more | 2024-10-29 |
| 11848218 | Semiconductor chamber component cleaning systems | Katty Marie Lydia Gamon Guyomard, Chidambara A. Ramalingam, Shawyon Jafari, Palash Joshi, Moin Ahmed Khan +5 more | 2023-12-19 |
| 8828482 | Electroless coated disks for high temperature applications and methods of making the same | Alan J. Ruffini, Lindsey A. Hamilton, Jean M. Laplante, Ambrose Schaffer, Frederick K. Lowes | 2014-09-09 |
| 8668953 | Annealing process for electroless coated disks for high temperature applications | — | 2014-03-11 |
| 8404369 | Electroless coated disks for high temperature applications and methods of making the same | Alan J. Ruffini, Lindsey A. Hamilton, Jean M. Laplante, Ambrose Schaffer, Frederick K. Lowes | 2013-03-26 |