Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131934 | Semiconductor substrate support leveling apparatus | Katherine Woo, Paul Brillhart, Jian Li, Shinnosuke Kawaguchi, David W. Groechel +4 more | 2024-10-29 |
| 11851758 | Fabrication of a high temperature showerhead | Sumit Agarwal, Katherine Woo, Shawyon Jafari, Jian Li | 2023-12-26 |
| 11848218 | Semiconductor chamber component cleaning systems | Katty Marie Lydia Gamon Guyomard, Shawyon Jafari, Palash Joshi, Moin Ahmed Khan, Kirubanandan Naina SHANMUGAM +5 more | 2023-12-19 |
| 11499229 | Substrate supports including metal-ceramic interfaces | Juan Carlos Rocha, Joseph M. Polese, Katty Marie Lydia Gamon Guyomard, Jian Li | 2022-11-15 |
| 8205352 | Vapor dryer having hydrophilic end effector | John Lewis, Michael Biese, Garrett H. Sin, Balaji Chandrasekaran, Tak Fan (Kerry) Ling | 2012-06-26 |
| 7980000 | Vapor dryer having hydrophilic end effector | John Lewis, Michael Biese, Garrett H. Sin, Balaji Chandrasekaran, Tak Fan (Kerry) Ling | 2011-07-19 |