Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851758 | Fabrication of a high temperature showerhead | Sumit Agarwal, Katherine Woo, Jian Li, Chidambara A. Ramalingam | 2023-12-26 |
| 11853042 | Part, sensor, and metrology data integration | Garrett H. Sin, Sidharth Bhatia, Katty Marie Lydia Gamon Guyomard, Heng-Cheng Pai, Pramod Nambiar +2 more | 2023-12-26 |
| 11848218 | Semiconductor chamber component cleaning systems | Katty Marie Lydia Gamon Guyomard, Chidambara A. Ramalingam, Palash Joshi, Moin Ahmed Khan, Kirubanandan Naina SHANMUGAM +5 more | 2023-12-19 |
| 10883932 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Xuesong Lu, Andrew V. LE, Fa Ji, Jang Seok OH +2 more | 2021-01-05 |
| 10600624 | System and method for substrate processing chambers | Kalyanjit Ghosh, Sanjeev Baluja, Mayur Govind Kulkarni, Shailendra Srivastava, Tejas Ulavi +9 more | 2020-03-24 |
| 10365216 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Xuesong Lu, Andrew V. LE, Fa Ji, Jang Seok OH +2 more | 2019-07-30 |