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Physically-informed multi-system hardware operating windows |
Jeong Hee Hong, Mi Hyun Jang, Se-Eun Cheon, Joshua Maher, Upendra Ummethala |
2025-12-30 |
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| 12504726 |
Determining equipment constant updates by machine learning |
Roger Alan Lindley, Upendra Ummethala, Thaddeus Siu-Por Li, Michael Howells, Steven E. Babayan +1 more |
2025-12-23 |
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| 12498705 |
Chamber matching by equipment constant updates |
Roger Alan Lindley, Upendra Ummethala, Thaddeus Siu-Por Li, Michael Howells, Steven E. Babayan +1 more |
2025-12-16 |
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| 12469686 |
Process characterization and correction using optical wall process sensor (OWPS) |
Jeffrey Yat Shan Au, Joshua Maher, Varoujan Chakarian, Patrick Tae, Zhen Zhu +1 more |
2025-11-11 |
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| 12467136 |
Process characterization and correction using optical wall process sensor (OWPS) |
Jeffrey Yat Shan Au, Zhen Zhu, Nicholas Ryan Pica, Varoujan Chakarian, Chih Hau Hu |
2025-11-11 |
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| 12366853 |
Sensor metrology data integration |
Garrett H. Sin, Heng-Cheng Pai, Pramod Nambiar, Ganesh Balasubramanian, Irfan Jamil |
2025-07-22 |
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| D1045924 |
Portion of a display panel with a graphical user interface |
Zhaozhao Zhu, Jeffrey Yat Shan Au, Shawn Levesque, Michael David Howells, Raja Sekhar Jetti |
2024-10-08 |
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| D1045923 |
Portion of a display panel with a graphical user interface |
Zhaozhao Zhu, Jeffrey Yat Shan Au, Shawn Levesque, Michael David Howells, Raja Sekhar Jetti |
2024-10-08 |
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| 12080519 |
Smart dynamic load simulator for RF power delivery control system |
Jie Yu, Yue Guo, Kartik Ramaswamy, Tao Zhang, Shahid Rauf +2 more |
2024-09-03 |
$44,731,000 |
| 12074073 |
Prescriptive analytics in highly collinear response space |
Jie Feng, Dermot Cantwell |
2024-08-27 |
$120,173,000 |
| D1031743 |
Portion of a display panel with a graphical user interface |
Zhaozhao Zhu, Jeffrey Yat Shan Au, Shawn Levesque, Michael David Howells, Raja Sekhar Jetti |
2024-06-18 |
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| 11853042 |
Part, sensor, and metrology data integration |
Garrett H. Sin, Katty Marie Lydia Gamon Guyomard, Shawyon Jafari, Heng-Cheng Pai, Pramod Nambiar +2 more |
2023-12-26 |
$30,871,000 |
| 11829873 |
Predictive modeling of a manufacturing process using a set of trained inverted models |
Dermot Cantwell, Serghei Malkov, Jie Feng |
2023-11-28 |
$39,424,000 |
| 11592812 |
Sensor metrology data integration |
Garrett H. Sin, Heng-Cheng Pai, Pramod Nambiar, Ganesh Balasubramanian, Irfan Jamil |
2023-02-28 |
$49,197,000 |
| 11545376 |
Plasma parameters and skew characterization by high speed imaging |
Edward P. Hammond, IV, Bhaskar Kumar, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian |
2023-01-03 |
$39,123,000 |
| 11495440 |
Plasma density control on substrate edge |
Bhaskar Kumar, Prashanth Kothnur, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian +1 more |
2022-11-08 |
$47,551,000 |
| 11328964 |
Prescriptive analytics in highly collinear response space |
Jie Feng, Dermot Cantwell |
2022-05-10 |
$45,778,000 |
| 11157661 |
Process development visualization tool |
Vinayak Veer Vats, Garrett H. Sin, Pramod Nambiar, Hang Yu, Sanjay Kamath +2 more |
2021-10-26 |
$68,163,000 |
| 11120976 |
Apparatus and methods for removing contaminant particles in a plasma process |
Bhaskar Kumar, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian |
2021-09-14 |
$84,054,000 |
| 10790121 |
Plasma density control on substrate edge |
Bhaskar Kumar, Prashanth Kothnur, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian +1 more |
2020-09-29 |
$24,138,000 |
| 10755903 |
RPS defect reduction by cyclic clean induced RPS cooling |
Zhili Zuo, Hidehiro Kojiri, Anjana M. Patel, Song-Moon Suh, Ganesh Balasubramanian |
2020-08-25 |
$29,525,000 |
| 10748797 |
Plasma parameters and skew characterization by high speed imaging |
Edward P. Hammond, IV, Bhaskar Kumar, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian |
2020-08-18 |
$40,862,000 |
| 10714319 |
Apparatus and methods for removing contaminant particles in a plasma process |
Bhaskar Kumar, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian |
2020-07-14 |
$28,056,000 |
| 9589773 |
In-situ etch rate determination for chamber clean endpoint |
Anjana M. Patel, Abdul Aziz Khaja |
2017-03-07 |
$38,660,000 |
| 8716154 |
Reduced pattern loading using silicon oxide multi-layers |
Paul Edward Gee, Shankar Venkataraman |
2014-05-06 |
$29,875,000 |
