Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12366853 | Sensor metrology data integration | Garrett H. Sin, Heng-Cheng Pai, Pramod Nambiar, Ganesh Balasubramanian, Irfan Jamil | 2025-07-22 |
| D1045924 | Portion of a display panel with a graphical user interface | Zhaozhao Zhu, Jeffrey Yat Shan Au, Shawn Levesque, Michael David Howells, Raja Sekhar Jetti | 2024-10-08 |
| D1045923 | Portion of a display panel with a graphical user interface | Zhaozhao Zhu, Jeffrey Yat Shan Au, Shawn Levesque, Michael David Howells, Raja Sekhar Jetti | 2024-10-08 |
| 12080519 | Smart dynamic load simulator for RF power delivery control system | Jie Yu, Yue Guo, Kartik Ramaswamy, Tao Zhang, Shahid Rauf +2 more | 2024-09-03 |
| 12074073 | Prescriptive analytics in highly collinear response space | Jie Feng, Dermot Cantwell | 2024-08-27 |
| D1031743 | Portion of a display panel with a graphical user interface | Zhaozhao Zhu, Jeffrey Yat Shan Au, Shawn Levesque, Michael David Howells, Raja Sekhar Jetti | 2024-06-18 |
| 11853042 | Part, sensor, and metrology data integration | Garrett H. Sin, Katty Marie Lydia Gamon Guyomard, Shawyon Jafari, Heng-Cheng Pai, Pramod Nambiar +2 more | 2023-12-26 |
| 11829873 | Predictive modeling of a manufacturing process using a set of trained inverted models | Dermot Cantwell, Serghei Malkov, Jie Feng | 2023-11-28 |
| 11592812 | Sensor metrology data integration | Garrett H. Sin, Heng-Cheng Pai, Pramod Nambiar, Ganesh Balasubramanian, Irfan Jamil | 2023-02-28 |
| 11545376 | Plasma parameters and skew characterization by high speed imaging | Edward P. Hammond, IV, Bhaskar Kumar, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian | 2023-01-03 |
| 11495440 | Plasma density control on substrate edge | Bhaskar Kumar, Prashanth Kothnur, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian +1 more | 2022-11-08 |
| 11328964 | Prescriptive analytics in highly collinear response space | Jie Feng, Dermot Cantwell | 2022-05-10 |
| 11157661 | Process development visualization tool | Vinayak Veer Vats, Garrett H. Sin, Pramod Nambiar, Hang Yu, Sanjay Kamath +2 more | 2021-10-26 |
| 11120976 | Apparatus and methods for removing contaminant particles in a plasma process | Bhaskar Kumar, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian | 2021-09-14 |
| 10790121 | Plasma density control on substrate edge | Bhaskar Kumar, Prashanth Kothnur, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian +1 more | 2020-09-29 |
| 10755903 | RPS defect reduction by cyclic clean induced RPS cooling | Zhili Zuo, Hidehiro Kojiri, Anjana M. Patel, Song-Moon Suh, Ganesh Balasubramanian | 2020-08-25 |
| 10748797 | Plasma parameters and skew characterization by high speed imaging | Edward P. Hammond, IV, Bhaskar Kumar, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian | 2020-08-18 |
| 10714319 | Apparatus and methods for removing contaminant particles in a plasma process | Bhaskar Kumar, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian | 2020-07-14 |
| 9589773 | In-situ etch rate determination for chamber clean endpoint | Anjana M. Patel, Abdul Aziz Khaja | 2017-03-07 |
| 8716154 | Reduced pattern loading using silicon oxide multi-layers | Paul Edward Gee, Shankar Venkataraman | 2014-05-06 |
| 8664127 | Two silicon-containing precursors for gapfill enhancing dielectric liner | Hiroshi Hamana, Paul Edward Gee, Shankar Venkataraman | 2014-03-04 |