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Bonding structure of e chuck to aluminum base configuration |
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2020-09-01 |
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Bonding structure of E chuck to aluminum base configuration |
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2015-01-20 |
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Charles Hardy |
2013-09-03 |
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2013-02-26 |
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Magnetic confinement of a plasma |
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Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
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2011-11-01 |
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Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
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2011-02-08 |
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Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
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2011-02-01 |
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Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
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1999-11-23 |