Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8092605 | Magnetic confinement of a plasma | Steven C. Shannon, Masao Drexel, Ying Rui, Ying Xiao, Roger Alan Lindley +1 more | 2012-01-10 |
| 6355557 | Oxide plasma etching process with a controlled wineglass shape | Cynthia B. Brooks, Walter R. Merry, Jason Regis | 2002-03-12 |
| 6325861 | Method for etching and cleaning a substrate | — | 2001-12-04 |