Issued Patents All Time
Showing 25 most recent of 110 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12432461 | Smart camera substrate | Upendra Ummethala, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2025-09-30 |
| 12406837 | Reaction cell for species sensing | Abdullah Zafar, Kelvin Chan | 2025-09-02 |
| 12368024 | Methods and apparatus for processing a substrate | Abdullah Zafar, William J. Durand, Xinyuan Chong, Kenric Choi, Weize Hu +4 more | 2025-07-22 |
| 12340978 | Symmetric and irregular shaped plasmas using modular microwave sources | Thai Cheng Chua, Farzad Houshmand, Christian Amormino | 2025-06-24 |
| 12315739 | Isotropic silicon nitride removal | Mikhail Korolik, Paul Edward Gee, Wei Ying Doreen Yong, Tuck Foong Koh, John Sudijono +1 more | 2025-05-27 |
| 12300497 | Method and apparatus of low temperature plasma enhanced chemical vapor deposition of graphene | Thai Cheng Chua, Christian Valencia, Chikuang Charles Wang, Bencherki Mebarki, Hanh Nguyen | 2025-05-13 |
| 12228534 | Capacitive sensor for monitoring gas concentration | Xiaopu Li, Kallol Bera, Yaoling Pan, Kelvin Chan, Amir Bayati +2 more | 2025-02-18 |
| 12216015 | MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing | Chuang-Chia Lin, David Peterson, Amir Bayati | 2025-02-04 |
| 12198966 | Substrate support with multiple embedded electrodes | Thai Cheng Chua, Jaeyong Cho | 2025-01-14 |
| 12191118 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Vladimir Knyazik +1 more | 2025-01-07 |
| 12144090 | Monolithic modular microwave source with integrated temperature control | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Thai Cheng Chua | 2024-11-12 |
| 12142458 | Symmetric plasma source to generate pie-shaped treatment | Anantha K. Subramani, Farzad Houshmand, Abhishek Chowdhury, John C. Forster, Kallol Bera | 2024-11-12 |
| 12119221 | PEALD nitride films | Hanhong Chen, Joseph AuBuchon | 2024-10-15 |
| 12114083 | Smart camera substrate | Upendra Ummethala, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2024-10-08 |
| 12094707 | Plasma enhanced CVD with periodic high voltage bias | Kelvin Chan, Travis Koh, Simon Huang | 2024-09-17 |
| 12033835 | Modular microwave source with multiple metal housings | Robert B. Moore, James D. Carducci, Richard Fovell, Sathya Swaroop Ganta, Karthikeyan Balaraman +1 more | 2024-07-09 |
| 12012652 | Single process volume to perform high-pressure and low-pressure processes with features to reduce cross-contamination | Kelvin Chan, Yang Guo, Ashish Goel, Anantha K. Subramani | 2024-06-18 |
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Daniel Sang Byun +5 more | 2024-06-11 |
| 12002654 | Modular high-frequency source | Thai Cheng Chua, Christian Amormino, Hanh Nguyen, Kallol Bera | 2024-06-04 |
| 11959868 | Capacitive sensor for monitoring gas concentration | Xiaopu Li, Kallol Bera, Yaoling Pan, Kelvin Chan, Amir Bayati +2 more | 2024-04-16 |
| 11955331 | Method of forming silicon nitride films using microwave plasma | Hanhong Chen, Kelvin Chan, Thai Cheng Chua | 2024-04-09 |
| 11946140 | Hot showerhead | Anantha K. Subramani, Seyyed A. Fazeli, Yang Guo, Ramcharan Sundar, Arun Kumar Kotrappa +5 more | 2024-04-02 |
| 11881384 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Vladimir Knyazik +1 more | 2024-01-23 |
| 11874189 | MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing | Chuang-Chia Lin, David Peterson, Amir Bayati | 2024-01-16 |
| 11823870 | PEALD titanium nitride with direct microwave plasma | Hanhong Chen, Arkaprava Dan, Joseph AuBuchon, Kyoung Ha Kim | 2023-11-21 |