| 12334383 |
Substrate support gap pumping to prevent glow discharge and light-up |
James D. Carducci, Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, Yang Yang |
2025-06-17 |
| 12191118 |
Monolithic modular microwave source with integrated process gas distribution |
James D. Carducci, Richard Fovell, Larry D. Elizaga, Vladimir Knyazik, Philip Allan Kraus +1 more |
2025-01-07 |
| 12144090 |
Monolithic modular microwave source with integrated temperature control |
James D. Carducci, Richard Fovell, Larry D. Elizaga, Thai Cheng Chua, Philip Allan Kraus |
2024-11-12 |
| 12033835 |
Modular microwave source with multiple metal housings |
Philip Allan Kraus, Robert B. Moore, James D. Carducci, Richard Fovell, Sathya Swaroop Ganta +1 more |
2024-07-09 |
| 11881384 |
Monolithic modular microwave source with integrated process gas distribution |
James D. Carducci, Richard Fovell, Larry D. Elizaga, Vladimir Knyazik, Philip Allan Kraus +1 more |
2024-01-23 |
| 11564292 |
Monolithic modular microwave source with integrated temperature control |
James D. Carducci, Richard Fovell, Larry D. Elizaga, Thai Cheng Chua, Philip Allan Kraus |
2023-01-24 |
| 10780447 |
Apparatus for controlling temperature uniformity of a showerhead |
Richard Fovell, James D. Carducci |
2020-09-22 |
