Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334383 | Substrate support gap pumping to prevent glow discharge and light-up | James D. Carducci, Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, Yang Yang | 2025-06-17 |
| 12191118 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Vladimir Knyazik, Philip Allan Kraus +1 more | 2025-01-07 |
| 12144090 | Monolithic modular microwave source with integrated temperature control | James D. Carducci, Richard Fovell, Larry D. Elizaga, Thai Cheng Chua, Philip Allan Kraus | 2024-11-12 |
| 12033835 | Modular microwave source with multiple metal housings | Philip Allan Kraus, Robert B. Moore, James D. Carducci, Richard Fovell, Sathya Swaroop Ganta +1 more | 2024-07-09 |
| 11881384 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Vladimir Knyazik, Philip Allan Kraus +1 more | 2024-01-23 |
| 11564292 | Monolithic modular microwave source with integrated temperature control | James D. Carducci, Richard Fovell, Larry D. Elizaga, Thai Cheng Chua, Philip Allan Kraus | 2023-01-24 |
| 10780447 | Apparatus for controlling temperature uniformity of a showerhead | Richard Fovell, James D. Carducci | 2020-09-22 |