Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191118 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Philip Allan Kraus +1 more | 2025-01-07 |
| 12033881 | Reduced localized force in electrostatic chucking | Sumanth Banda, Stephen Prouty | 2024-07-09 |
| 11881384 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Philip Allan Kraus +1 more | 2024-01-23 |
| 11728141 | Gas hub for plasma reactor | Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Bojenna Keating, Samer Banna | 2023-08-15 |
| 11244811 | Plasma reactor with highly symmetrical four-fold gas injection | Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Bojenna Keating, Samer Banna | 2022-02-08 |
| 11189502 | Showerhead with interlaced gas feed and removal and methods of use | Kallol Bera, Shahid Rauf, James D. Carducci, Anantha K. Subramani | 2021-11-30 |
| 11139150 | Nozzle for multi-zone gas injection assembly | Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Bojenna Keating, Samer Banna | 2021-10-05 |
| 11130142 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2021-09-28 |
| 10790120 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Hamid Noorbakhsh, Jisoo Kim, Wonseok Lee, Usama Dadu | 2020-09-29 |
| 10625277 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2020-04-21 |
| 10607816 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Hamid Noorbakhsh, Jisoo Kim, Wonseok Lee, Usama Dadu | 2020-03-31 |
| 10586718 | Cooling base with spiral channels for ESC | Shahid Rauf, Stephen Prouty, Roland Smith, Denis M. Koosau | 2020-03-10 |
| 10553398 | Power deposition control in inductively coupled plasma (ICP) reactors | Samer Banna, Tza-Jing Gung, Kyle Tantiwong, Dan Marohl, Valentin N. Todorow +1 more | 2020-02-04 |
| 10410841 | Side gas injection kit for multi-zone gas injection assembly | Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Bojenna Keating, Samer Banna | 2019-09-10 |
| 10332772 | Multi-zone heated ESC with independent edge zones | Kyle Tantiwong, Samer Banna | 2019-06-25 |
| 10163606 | Plasma reactor with highly symmetrical four-fold gas injection | Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Bojenna Keating, Samer Banna | 2018-12-25 |
| 10008368 | Multi-zone gas injection assembly with azimuthal and radial distribution control | Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Bojenna Keating, Samer Banna | 2018-06-26 |
| 9945033 | High efficiency inductively coupled plasma source with customized RF shield for plasma profile control | Samer Banna, Waheb Bishara, Valentin N. Todorow | 2018-04-17 |
| 9911579 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Hamid Noorbakhsh, Jisoo Kim, Wonseok Lee, Usama Dadu | 2018-03-06 |
| 9610591 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2017-04-04 |
| 9536710 | Tunable gas delivery assembly with internal diffuser and angular injection | Kyle Tantiwong, Samer Banna, Waheb Bishara | 2017-01-03 |
| 9472378 | Multiple zone coil antenna with plural radial lobes | Samer Banna, Kyle Tantiwong | 2016-10-18 |
| 9312104 | Coil antenna with plural radial lobes | Samer Banna, Kyle Tantiwong | 2016-04-12 |