| 12444585 |
Electrical connector for cooled substrate support assembly |
Andrew Antoine NOUJAIM, Alvaro Garcia de Gorordo, Andreas Schmid |
2025-10-14 |
|
| 12397330 |
Condition selectable backside gas |
Martin Perez-Guzman, Sumanth Banda, Rajinder Dhindsa, Alvaro Garcia de Gorordo |
2025-08-26 |
|
| 12334315 |
Cooled substrate support assembly for radio frequency environments |
Vijay D. Parkhe, Andreas Schmid, Andrew Antoine NOUJAIM, Alvaro Garcia de Gorordo, Martin Perez-Guzman |
2025-06-17 |
|
| 12033881 |
Reduced localized force in electrostatic chucking |
Sumanth Banda, Vladimir Knyazik |
2024-07-09 |
$62,454,000 |
| 11887879 |
In-situ apparatus for semiconductor process module |
Yogananda Sarode Vishwanath, Steven E. Babayan, Andreas Schmid |
2024-01-30 |
$39,141,000 |
| 11764041 |
Adjustable thermal break in a substrate support |
Alvaro Garcia de Gorordo, Daniel Sang Byun, Andreas Schmid, Andrew Antoine NOUJAIM |
2023-09-19 |
$44,467,000 |
| 11666952 |
Condition selectable backside gas |
Martin Perez-Guzman, Sumanth Banda, Rajinder Dhindsa, Alvaro Garcia de Gorordo |
2023-06-06 |
$40,761,000 |
| 11651987 |
Substrate support carrier with improved bond layer protection |
Andreas Schmid, Jonathan Simmons, Sumanth Banda |
2023-05-16 |
$64,199,000 |
| 11646183 |
Substrate support assembly with arc resistant coolant conduit |
Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM |
2023-05-09 |
$42,400,000 |
| 11569114 |
Semiconductor processing with cooled electrostatic chuck |
Yogananda Sarode Vishwanath, Steven E. Babayan, Andreas Schmid, Andrew Antoine NOUJAIM |
2023-01-31 |
$29,381,000 |
| 11456161 |
Substrate support pedestal |
Steven Joseph LAROSA |
2022-09-27 |
$38,581,000 |
| 11437261 |
Cryogenic electrostatic chuck |
Yogananda Sarode Vishwanath, Steven E. Babayan, Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM |
2022-09-06 |
$39,364,000 |
| 11380572 |
Substrate support carrier with improved bond layer protection |
Andreas Schmid, Jonathan Simmons, Sumanth Banda |
2022-07-05 |
$35,888,000 |
| 11373893 |
Cryogenic electrostatic chuck |
Yogananda Sarode Vishwanath, Steven E. Babayan, Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM |
2022-06-28 |
$26,475,000 |
| 11075105 |
In-situ apparatus for semiconductor process module |
Yogananda Sarode Vishwanath, Steven E. Babayan, Andreas Schmid |
2021-07-27 |
$132,720,000 |
| 10641756 |
Automated soil measurement |
Bevan Gerber-Siff, Justin Stewart White, Robert Tirrell, Michael John Preiner, Nicholas Koshnick |
2020-05-05 |
|
| 10586718 |
Cooling base with spiral channels for ESC |
Vladimir Knyazik, Shahid Rauf, Roland Smith, Denis M. Koosau |
2020-03-10 |
$33,694,000 |
| 10410900 |
Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic |
Shih-Ying Huang, Steven E. Babayan, Phillip Criminale, Anthony Huang |
2019-09-10 |
$15,043,000 |
| 10168260 |
Self-filling soil processing chamber with dynamic extractant volume |
Justin Stewart White, Michael John Preiner, Nicholas Koshnick |
2019-01-01 |
|
| 9863925 |
Automated soil measurement device |
Bevan Gerber-Siff, Justin Stewart White, Robert Tirrell, Michael John Preiner, Nicholas Koshnick |
2018-01-09 |
|
| 9739693 |
Self-filling soil processing chamber with dynamic extractant volume |
Justin Stewart White, Michael John Preiner, Nicholas Koshnick |
2017-08-22 |
$15,414,000 |
| 9291545 |
Self-filling soil processing chamber with dynamic extractant volume |
Justin Stewart White, Michael John Preiner, Nicholas Carleton Koshnick |
2016-03-22 |
$99,564,000 |
| 9146223 |
Automated soil measurement device |
Bevan Gerber-Siff, Justin Stewart White, Robert Tirrell, Michael John Preiner, Nicholas Carleton Koshnick |
2015-09-29 |
$158,619,000 |
