Cooled substrate support assembly for radio frequency environments

Assignee

• Applied Materials

Inventors

• Vijay D. Parkhe (143 patents)
• Andreas Schmid (71 patents)
• Andrew Antoine NOUJAIM (7 patents)
• Stephen Prouty (23 patents)
• Alvaro Garcia de Gorordo (12 patents)
• Martin Perez-Guzman (6 patents)

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