Issued Patents All Time
Showing 25 most recent of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372009 | Oil-cooled exhaust turbine apparatus | Moritz Mosdzien, Stefan Gantert, Wolfgang Joos, Davide Marra | 2025-07-29 |
| 12334315 | Cooled substrate support assembly for radio frequency environments | Vijay D. Parkhe, Andrew Antoine NOUJAIM, Stephen Prouty, Alvaro Garcia de Gorordo, Martin Perez-Guzman | 2025-06-17 |
| D1055006 | Support ring for an interlocking process kit for a substrate processing chamber | Sahiti Nallagonda, Jonathan Simmons, Xinwei Huang, Peter Muraoka | 2024-12-24 |
| 12165905 | Process kit enclosure system | Helder Lee, Nicholas Michael Kopec, Leon Volfovski, Douglas R. McAllister, Jeffrey C. Hudgens +2 more | 2024-12-10 |
| D1042373 | Sliding ring for an interlocking process kit for a substrate processing chamber | Sahiti Nallagonda, Jonathan Simmons, Xinwei Huang, Peter Muraoka | 2024-09-17 |
| D1042374 | Support pipe for an interlocking process kit for a substrate processing chamber | Sahiti Nallagonda, Jonathan Simmons, Xinwei Huang, Peter Muraoka | 2024-09-17 |
| 12078792 | Method of providing an assembled image using a digital microscope, digital microscope system, and program for providing an assembled image using a digital microscope | Ludwig Wildner | 2024-09-03 |
| 12061285 | Detecting a parking row with a vehicle radar system | Christopher Unverdorben, Christian Pfaffenzeller | 2024-08-13 |
| 12024175 | Vehicle system for detection of oncoming vehicles | Michael Maas, Christopher Unverdorben | 2024-07-02 |
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Daniel Sang Byun +5 more | 2024-06-11 |
| 11953056 | Shaft bearing assembly having a pressure reduction device and method of reducing a pressure inside a bearing housing supporting a shaft | Moritz Mosdzien, Peter Limacher, Marcel Joho, Wolfgang Joos | 2024-04-09 |
| 11946243 | Work and recreation space module for a work environment | Bastian Pokorni | 2024-04-02 |
| 11887879 | In-situ apparatus for semiconductor process module | Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty | 2024-01-30 |
| 11842917 | Process kit ring adaptor | Leon Volfovski, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan, Douglas R. McAllister +3 more | 2023-12-12 |
| 11823937 | Calibration of an aligner station of a processing system | Nicholas Michael Bergantz, Leon Volfovski, Sanggyum Kim, Damon K. Cox, Paul Z. Wirth | 2023-11-21 |
| 11764041 | Adjustable thermal break in a substrate support | Alvaro Garcia de Gorordo, Daniel Sang Byun, Stephen Prouty, Andrew Antoine NOUJAIM | 2023-09-19 |
| 11721569 | Method and apparatus for determining a position of a ring within a process kit | Andrew Myles, Phillip Criminale, Steven E. Babayan | 2023-08-08 |
| 11668553 | Apparatus and method for controlling edge ring variation | Sathyendra Ghantasala, Leonid Dorf, Evgeny Kamenetskiy, Peter Muraoka, Denis M. Koosau +1 more | 2023-06-06 |
| 11651987 | Substrate support carrier with improved bond layer protection | Stephen Prouty, Jonathan Simmons, Sumanth Banda | 2023-05-16 |
| 11646183 | Substrate support assembly with arc resistant coolant conduit | Stephen Prouty, Alvaro Garcia de Gorordo, Andrew Antoine NOUJAIM | 2023-05-09 |
| 11585895 | Detection of parking slot configuration based on repetitive patterns | Christopher Unverdorben, Christian Pfaffenzeller | 2023-02-21 |
| 11569114 | Semiconductor processing with cooled electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty, Andrew Antoine NOUJAIM | 2023-01-31 |
| 11509254 | Method for detecting a motor phase fault of a motor arrangement and drive circuit for driving an electronically commutated motor | Martin Weinmann, Sebastian Tinius | 2022-11-22 |
| 11462993 | Controller for determining dead times for power electronics half-bridges | — | 2022-10-04 |
| 11433900 | Vehicle system for detection of oncoming vehicles | Michael Maas, Christopher Unverdorben | 2022-09-06 |