| 12486120 |
Substrate processing system carrier |
Aaron Green, Nicholas Michael Bergantz, Damon K. Cox |
2025-12-02 |
|
| 12444585 |
Electrical connector for cooled substrate support assembly |
Andrew Antoine NOUJAIM, Alvaro Garcia de Gorordo, Stephen Prouty |
2025-10-14 |
|
| 12435963 |
Apparatus and method for controlling edge ring variation |
Sathyendra Ghantasala, Leonid Dorf, Evgeny Kamenetskiy, Peter Muraoka, Denis M. Koosau +1 more |
2025-10-07 |
|
| 12372009 |
Oil-cooled exhaust turbine apparatus |
Moritz Mosdzien, Stefan Gantert, Wolfgang Joos, Davide Marra |
2025-07-29 |
|
| 12334315 |
Cooled substrate support assembly for radio frequency environments |
Vijay D. Parkhe, Andrew Antoine NOUJAIM, Stephen Prouty, Alvaro Garcia de Gorordo, Martin Perez-Guzman |
2025-06-17 |
|
| D1055006 |
Support ring for an interlocking process kit for a substrate processing chamber |
Sahiti Nallagonda, Jonathan Simmons, Xinwei Huang, Peter Muraoka |
2024-12-24 |
|
| 12165905 |
Process kit enclosure system |
Helder Lee, Nicholas Michael Kopec, Leon Volfovski, Douglas R. McAllister, Jeffrey C. Hudgens +2 more |
2024-12-10 |
$69,596,000 |
| D1042373 |
Sliding ring for an interlocking process kit for a substrate processing chamber |
Sahiti Nallagonda, Jonathan Simmons, Xinwei Huang, Peter Muraoka |
2024-09-17 |
|
| D1042374 |
Support pipe for an interlocking process kit for a substrate processing chamber |
Sahiti Nallagonda, Jonathan Simmons, Xinwei Huang, Peter Muraoka |
2024-09-17 |
|
| 12078792 |
Method of providing an assembled image using a digital microscope, digital microscope system, and program for providing an assembled image using a digital microscope |
Ludwig Wildner |
2024-09-03 |
|
| 12061285 |
Detecting a parking row with a vehicle radar system |
Christopher Unverdorben, Christian Pfaffenzeller |
2024-08-13 |
|
| 12024175 |
Vehicle system for detection of oncoming vehicles |
Michael Maas, Christopher Unverdorben |
2024-07-02 |
|
| 12009236 |
Sensors and system for in-situ edge ring erosion monitor |
Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Daniel Sang Byun +5 more |
2024-06-11 |
$84,570,000 |
| 11953056 |
Shaft bearing assembly having a pressure reduction device and method of reducing a pressure inside a bearing housing supporting a shaft |
Moritz Mosdzien, Peter Limacher, Marcel Joho, Wolfgang Joos |
2024-04-09 |
|
| 11946243 |
Work and recreation space module for a work environment |
Bastian Pokorni |
2024-04-02 |
|
| 11887879 |
In-situ apparatus for semiconductor process module |
Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty |
2024-01-30 |
$39,141,000 |
| 11842917 |
Process kit ring adaptor |
Leon Volfovski, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan, Douglas R. McAllister +3 more |
2023-12-12 |
$82,062,000 |
| 11823937 |
Calibration of an aligner station of a processing system |
Nicholas Michael Bergantz, Leon Volfovski, Sanggyum Kim, Damon K. Cox, Paul Z. Wirth |
2023-11-21 |
$39,416,000 |
| 11764041 |
Adjustable thermal break in a substrate support |
Alvaro Garcia de Gorordo, Daniel Sang Byun, Stephen Prouty, Andrew Antoine NOUJAIM |
2023-09-19 |
$44,467,000 |
| 11721569 |
Method and apparatus for determining a position of a ring within a process kit |
Andrew Myles, Phillip Criminale, Steven E. Babayan |
2023-08-08 |
|
| 11668553 |
Apparatus and method for controlling edge ring variation |
Sathyendra Ghantasala, Leonid Dorf, Evgeny Kamenetskiy, Peter Muraoka, Denis M. Koosau +1 more |
2023-06-06 |
$40,761,000 |
| 11651987 |
Substrate support carrier with improved bond layer protection |
Stephen Prouty, Jonathan Simmons, Sumanth Banda |
2023-05-16 |
$64,199,000 |
| 11646183 |
Substrate support assembly with arc resistant coolant conduit |
Stephen Prouty, Alvaro Garcia de Gorordo, Andrew Antoine NOUJAIM |
2023-05-09 |
$42,400,000 |
| 11585895 |
Detection of parking slot configuration based on repetitive patterns |
Christopher Unverdorben, Christian Pfaffenzeller |
2023-02-21 |
|
| 11569114 |
Semiconductor processing with cooled electrostatic chuck |
Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty, Andrew Antoine NOUJAIM |
2023-01-31 |
$29,381,000 |
