Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165905 | Process kit enclosure system | Helder Lee, Leon Volfovski, Douglas R. McAllister, Andreas Schmid, Jeffrey C. Hudgens +2 more | 2024-12-10 |
| 12142503 | Sensor-based correction of robot-held object | Damon K. Cox, Leon Volfovski | 2024-11-12 |
| 12076863 | Autoteach system | Lyle Kosinski, Matvey Farber, Jeffrey C. Hudgens | 2024-09-03 |
| 11842917 | Process kit ring adaptor | Leon Volfovski, Andreas Schmid, Denis M. Koosau, Steven E. Babayan, Douglas R. McAllister +3 more | 2023-12-12 |
| 11626305 | Sensor-based correction of robot-held object | Damon K. Cox, Leon Volfovski | 2023-04-11 |
| 11370114 | Autoteach enclosure system | Lyle Kosinski, Matvey Farber, Jeffrey C. Hudgens | 2022-06-28 |
| 11101115 | Ring removal from processing chamber | Damon K. Cox, Andreas Schmid | 2021-08-24 |
| 10964584 | Process kit ring adaptor | Leon Volfovski, Andreas Schmid, Denis M. Koosau, Steven E. Babayan, Douglas R. McAllister +3 more | 2021-03-30 |
| 8985935 | Mass damper for semiconductor wafer handling end effector | Mark Tan, Richard M. Blank | 2015-03-24 |