Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406865 | Substrate carrier with array of independently controllable heater elements | Phillip Criminale, Zhiqiang Guo | 2025-09-02 |
| 12334385 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2025-06-17 |
| 12211734 | Lift pin mechanism | Alexander SULYMAN, Carlaton WONG, Rajinder Dhindsa, Timothy Joseph Franklin, Anwar Husain +2 more | 2025-01-28 |
| 12165905 | Process kit enclosure system | Helder Lee, Nicholas Michael Kopec, Leon Volfovski, Douglas R. McAllister, Andreas Schmid +2 more | 2024-12-10 |
| 12094752 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Olivier Luere +2 more | 2024-09-17 |
| 12009244 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2024-06-11 |
| 11887879 | In-situ apparatus for semiconductor process module | Yogananda Sarode Vishwanath, Stephen Prouty, Andreas Schmid | 2024-01-30 |
| 11842917 | Process kit ring adaptor | Leon Volfovski, Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Douglas R. McAllister +3 more | 2023-12-12 |
| 11735401 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Upendra Ummethala, Lei Lian | 2023-08-22 |
| 11721569 | Method and apparatus for determining a position of a ring within a process kit | Andrew Myles, Andreas Schmid, Phillip Criminale | 2023-08-08 |
| 11622419 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Phillip Criminale, David Ullstrom | 2023-04-04 |
| 11569114 | Semiconductor processing with cooled electrostatic chuck | Yogananda Sarode Vishwanath, Andreas Schmid, Stephen Prouty, Andrew Antoine NOUJAIM | 2023-01-31 |
| 11508558 | Thermal repeatability and in-situ showerhead temperature monitoring | Timothy Joseph Franklin, Philip Allan Kraus | 2022-11-22 |
| 11437261 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Stephen Prouty, Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM | 2022-09-06 |
| 11393710 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Olivier Luere +2 more | 2022-07-19 |
| 11373893 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Stephen Prouty, Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM | 2022-06-28 |
| 11114286 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Upendra Ummethala, Lei Lian | 2021-09-07 |
| 11075105 | In-situ apparatus for semiconductor process module | Yogananda Sarode Vishwanath, Stephen Prouty, Andreas Schmid | 2021-07-27 |
| 10964584 | Process kit ring adaptor | Leon Volfovski, Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Douglas R. McAllister +3 more | 2021-03-30 |
| 10607817 | Thermal repeatability and in-situ showerhead temperature monitoring | Timothy Joseph Franklin, Philip Allan Kraus | 2020-03-31 |
| 10535544 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2020-01-14 |
| 10440777 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Phillip Criminale, David Ullstrom | 2019-10-08 |
| 10409295 | Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS) | Ming Xu, Sushant S. Koshti, Michael R. Rice, Jennifer Y. Sun | 2019-09-10 |
| 10410900 | Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic | Shih-Ying Huang, Phillip Criminale, Stephen Prouty, Anthony Huang | 2019-09-10 |
| 9472435 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2016-10-18 |