| 12504726 |
Determining equipment constant updates by machine learning |
Sidharth Bhatia, Roger Alan Lindley, Upendra Ummethala, Thaddeus Siu-Por Li, Michael Howells +1 more |
2025-12-23 |
|
| 12498705 |
Chamber matching by equipment constant updates |
Sidharth Bhatia, Roger Alan Lindley, Upendra Ummethala, Thaddeus Siu-Por Li, Michael Howells +1 more |
2025-12-16 |
|
| 12406865 |
Substrate carrier with array of independently controllable heater elements |
Phillip Criminale, Zhiqiang Guo |
2025-09-02 |
|
| 12334385 |
Tunable temperature controlled substrate support assembly |
Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl |
2025-06-17 |
|
| 12211734 |
Lift pin mechanism |
Alexander SULYMAN, Carlaton WONG, Rajinder Dhindsa, Timothy Joseph Franklin, Anwar Husain +2 more |
2025-01-28 |
|
| 12165905 |
Process kit enclosure system |
Helder Lee, Nicholas Michael Kopec, Leon Volfovski, Douglas R. McAllister, Andreas Schmid +2 more |
2024-12-10 |
$69,596,000 |
| 12094752 |
Wafer edge ring lifting solution |
Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Olivier Luere +2 more |
2024-09-17 |
$46,375,000 |
| 12009244 |
Tunable temperature controlled substrate support assembly |
Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl |
2024-06-11 |
$84,570,000 |
| 11887879 |
In-situ apparatus for semiconductor process module |
Yogananda Sarode Vishwanath, Stephen Prouty, Andreas Schmid |
2024-01-30 |
$39,141,000 |
| 11842917 |
Process kit ring adaptor |
Leon Volfovski, Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Douglas R. McAllister +3 more |
2023-12-12 |
$82,062,000 |
| 11735401 |
In-situ optical chamber surface and process sensor |
Chuang-Chia Lin, Upendra Ummethala, Lei Lian |
2023-08-22 |
$40,609,000 |
| 11721569 |
Method and apparatus for determining a position of a ring within a process kit |
Andrew Myles, Andreas Schmid, Phillip Criminale |
2023-08-08 |
|
| 11622419 |
Azimuthally tunable multi-zone electrostatic chuck |
Chunlei Zhang, Phillip Criminale, David Ullstrom |
2023-04-04 |
$41,324,000 |
| 11569114 |
Semiconductor processing with cooled electrostatic chuck |
Yogananda Sarode Vishwanath, Andreas Schmid, Stephen Prouty, Andrew Antoine NOUJAIM |
2023-01-31 |
$29,381,000 |
| 11508558 |
Thermal repeatability and in-situ showerhead temperature monitoring |
Timothy Joseph Franklin, Philip Allan Kraus |
2022-11-22 |
$48,755,000 |
| 11437261 |
Cryogenic electrostatic chuck |
Yogananda Sarode Vishwanath, Stephen Prouty, Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM |
2022-09-06 |
$39,364,000 |
| 11393710 |
Wafer edge ring lifting solution |
Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Olivier Luere +2 more |
2022-07-19 |
$63,937,000 |
| 11373893 |
Cryogenic electrostatic chuck |
Yogananda Sarode Vishwanath, Stephen Prouty, Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM |
2022-06-28 |
$26,475,000 |
| 11114286 |
In-situ optical chamber surface and process sensor |
Chuang-Chia Lin, Upendra Ummethala, Lei Lian |
2021-09-07 |
$49,370,000 |
| 11075105 |
In-situ apparatus for semiconductor process module |
Yogananda Sarode Vishwanath, Stephen Prouty, Andreas Schmid |
2021-07-27 |
$132,720,000 |
| 10964584 |
Process kit ring adaptor |
Leon Volfovski, Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Douglas R. McAllister +3 more |
2021-03-30 |
$120,425,000 |
| 10607817 |
Thermal repeatability and in-situ showerhead temperature monitoring |
Timothy Joseph Franklin, Philip Allan Kraus |
2020-03-31 |
$21,055,000 |
| 10535544 |
Tunable temperature controlled substrate support assembly |
Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl |
2020-01-14 |
$50,821,000 |
| 10440777 |
Azimuthally tunable multi-zone electrostatic chuck |
Chunlei Zhang, Phillip Criminale, David Ullstrom |
2019-10-08 |
$26,143,000 |
| 10410900 |
Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic |
Shih-Ying Huang, Phillip Criminale, Stephen Prouty, Anthony Huang |
2019-09-10 |
$15,043,000 |
