Issued Patents All Time
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165905 | Process kit enclosure system | Helder Lee, Nicholas Michael Kopec, Douglas R. McAllister, Andreas Schmid, Jeffrey C. Hudgens +2 more | 2024-12-10 |
| 12142503 | Sensor-based correction of robot-held object | Nicholas Michael Kopec, Damon K. Cox | 2024-11-12 |
| 11842917 | Process kit ring adaptor | Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan, Douglas R. McAllister +3 more | 2023-12-12 |
| 11823937 | Calibration of an aligner station of a processing system | Nicholas Michael Bergantz, Andreas Schmid, Sanggyum Kim, Damon K. Cox, Paul Z. Wirth | 2023-11-21 |
| 11626305 | Sensor-based correction of robot-held object | Nicholas Michael Kopec, Damon K. Cox | 2023-04-11 |
| 11600580 | Replaceable end effector contact pads, end effectors, and maintenance methods | Whitney B. Kroetz, Damon K. Cox, Jeffrey C. Hudgens, Balamurali Murugaraj | 2023-03-07 |
| 11211269 | Multi-object capable loadlock system | Andrew Paul Harbert, Michael C Kuchar, Nicholas Michael Bergantz, Sivakumar Ramalingam, Karuppasamy Muthukamatchi +1 more | 2021-12-28 |
| 10964584 | Process kit ring adaptor | Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan, Douglas R. McAllister +3 more | 2021-03-30 |
| 10736182 | Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers | Matthew J. Busche, Wendell Glenn Boyd, Jr., Todd Egan, Gregory L. Kirk, Vijay D. Parkhe +1 more | 2020-08-04 |
| 10242890 | Substrate support with heater | Mayur Govind Kulkarni | 2019-03-26 |
| 10217650 | Methods and apparatus for substrate edge cleaning | James M. Holden, Song-Moon Suh, Todd Egan, Kalyanjit Ghosh, Michael R. Rice +1 more | 2019-02-26 |
| 9986598 | Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods | Matthew J. Busche, Wendell Glenn Boyd, Jr., Dmitry A. Dzilno, Vijay D. Parkhe, Michael R. Rice | 2018-05-29 |
| 9706605 | Substrate support with feedthrough structure | Mayur Govind Kulkarni | 2017-07-11 |
| 9698041 | Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods | Matthew J. Busche, Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Michael R. Rice | 2017-07-04 |
| 9698074 | Heated substrate support with temperature profile control | Nir Merry | 2017-07-04 |
| 9538583 | Substrate support with switchable multizone heater | Mayur Govind Kulkarni, Alex Minkovich, Michael R. Rice | 2017-01-03 |
| 9443714 | Methods and apparatus for substrate edge cleaning | James M. Holden, Song-Moon Suh, Todd Egan, Kalyanjit Ghosh, Michael R. Rice +1 more | 2016-09-13 |
| 8550031 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Jay D. Pinson, II, Michael R. Rice +10 more | 2013-10-08 |
| 8215262 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Jay D. Pinson, II, Michael R. Rice +10 more | 2012-07-10 |
| 8181596 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Jay D. Pinson, II, Michael R. Rice +10 more | 2012-05-22 |
| 8146530 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Jay D. Pinson, II, Michael R. Rice +10 more | 2012-04-03 |
| 8099817 | Wafer edge cleaning | Joseph Yudovsky, Anne-Douce Coulin | 2012-01-24 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Jay D. Pinson, II, Michael R. Rice +10 more | 2011-04-12 |
| 7900311 | Wafer edge cleaning | Joseph Yudovsky, Anne-Douce Coulin | 2011-03-08 |
| 7779527 | Methods and apparatus for installing a scrubber brush on a mandrel | Joseph Yudovsky, Tai T. Ngo, Anne-Douce Coulin | 2010-08-24 |