| 12492890 |
In-situ reflectometry for real-time process control |
Khokan Chandra Paul, Zhepeng CONG, Tao SHENG, Edward W. Budiarto |
2025-12-09 |
|
| 12276490 |
System and method to map thickness variations of substrates in manufacturing systems |
Mehdi Vaez-Iravani, Gopalakrishna B. Prabhu |
2025-04-15 |
|
| 12265377 |
Autonomous substrate processing system |
Priyadarshi Panda, Lei Lian, Pengyu Han, Prashant Aji, Eli Mor +2 more |
2025-04-01 |
|
| 12225808 |
In-line monitoring of OLED layer thickness and dopant concentration |
Yeishin Tung, Byung Sung Kwak, Robert Jan Visser, Guoheng Zhao, Dinesh Kabra +1 more |
2025-02-11 |
|
| 12211717 |
Spatial pattern loading measurement with imaging metrology |
Eric Ng, Edward W. Budiarto, Mehdi Vaez-Iravani, Venkatakaushik Voleti |
2025-01-28 |
|
| 12098914 |
Surface roughness and emissivity determination |
Eric Ng, Mehdi Vaez-Iravani |
2024-09-24 |
$100,019,000 |
| 12062583 |
Optical metrology models for in-line film thickness measurements |
Eric Ng, Edward W. Budiarto, Sergey Starik |
2024-08-13 |
$69,975,000 |
| 12002665 |
Real-time detection of particulate matter during deposition chamber manufacturing |
Mehdi Vaez-Iravani, Kyle Tantiwong |
2024-06-04 |
$68,807,000 |
| 11927535 |
Metrology for OLED manufacturing using photoluminescence spectroscopy |
Avishek Ghosh, Byung Sung Kwak, Robert Jan Visser, Gangadhar Banappanavar, Dinesh Kabra |
2024-03-12 |
$97,620,000 |
| 11908716 |
Image-based in-situ process monitoring |
Guoheng Zhao, Venkatakaushik Voleti, Kyle Tantiwong, Andreas Schulze, Niranjan Ramchandra Khasgiwale +1 more |
2024-02-20 |
$66,055,000 |
| 11901203 |
Substrate process endpoint detection using machine learning |
Pengyu Han, Lei Lian, Shu-Yu Chen, Wan Hsueh Lai, Chao-Hsien Lee +3 more |
2024-02-13 |
$47,589,000 |
| 11898249 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2024-02-13 |
$47,589,000 |
| 11856833 |
In-line monitoring of OLED layer thickness and dopant concentration |
Yeishin Tung, Byung Sung Kwak, Robert Jan Visser, Guoheng Zhao, Dinesh Kabra +1 more |
2023-12-26 |
$30,871,000 |
| 11709477 |
Autonomous substrate processing system |
Priyadarshi Panda, Lei Lian, Pengyu Han, Prashant Aji, Eli Mor +2 more |
2023-07-25 |
$93,796,000 |
| 11662317 |
Metrology for OLED manufacturing using photoluminescence spectroscopy |
Avishek Ghosh, Byung Sung Kwak, Robert Jan Visser, Gangadhar Banappanavar, Dinesh Kabra |
2023-05-30 |
$32,229,000 |
| 11613812 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2023-03-28 |
$69,791,000 |
| 11609183 |
Methods and systems to measure properties of products on a moving blade in electronic device manufacturing machines |
Avishek Ghosh, Edward W. Budiarto, Guoheng Zhao |
2023-03-21 |
$36,722,000 |
| 11441992 |
Method and apparatus for detection of particle size in a fluid |
Mehdi Vaez-Iravani, Guoheng Zhao |
2022-09-13 |
$52,107,000 |
| 11226234 |
Spectrum shaping devices and techniques for optical characterization applications |
Guoheng Zhao, Edward W. Budiarto |
2022-01-18 |
$96,816,000 |
| 11204312 |
In-situ full wafer metrology system |
Ami Sade, Shay Assaf, Jacob Newman |
2021-12-21 |
$167,553,000 |
| 11187654 |
Imaging reflectometer |
Guoheng Zhao, Mehdi Vaez-Iravani |
2021-11-30 |
$50,552,000 |
| 11119051 |
Particle detection for substrate processing |
Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Gregory L. Kirk, Abraham Ravid +1 more |
2021-09-14 |
$84,054,000 |
| 10935492 |
Metrology for OLED manufacturing using photoluminescence spectroscopy |
Avishek Ghosh, Byung Sung Kwak, Robert Jan Visser, Gangadhar Banappanavar, Dinesh Kabra |
2021-03-02 |
$62,769,000 |
| 10923371 |
Metrology system for substrate deformation measurement |
Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong |
2021-02-16 |
$36,444,000 |
| 10886155 |
Optical stack deposition and on-board metrology |
Mingwei Zhu, Zihao Yang, Nag B. Patibandla, Daniel Lee Diehl, Yong Cao +5 more |
2021-01-05 |
$38,335,000 |
