Issued Patents All Time
Showing 1–25 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322620 | Reflective waveplates for pupil polarization filtering | Chong SHEN, Bret Whiteside | 2025-06-03 |
| 12288350 | Image based metrology of surface deformations | Mehdi Vaez-Iravani | 2025-04-29 |
| 12225808 | In-line monitoring of OLED layer thickness and dopant concentration | Yeishin Tung, Byung Sung Kwak, Robert Jan Visser, Todd Egan, Dinesh Kabra +1 more | 2025-02-11 |
| 11908716 | Image-based in-situ process monitoring | Venkatakaushik Voleti, Todd Egan, Kyle Tantiwong, Andreas Schulze, Niranjan Ramchandra Khasgiwale +1 more | 2024-02-20 |
| 11856833 | In-line monitoring of OLED layer thickness and dopant concentration | Yeishin Tung, Byung Sung Kwak, Robert Jan Visser, Todd Egan, Dinesh Kabra +1 more | 2023-12-26 |
| 11609183 | Methods and systems to measure properties of products on a moving blade in electronic device manufacturing machines | Todd Egan, Avishek Ghosh, Edward W. Budiarto | 2023-03-21 |
| 11442000 | In-situ, real-time detection of particulate defects in a fluid | Mehdi Vaez-Iravani, Sankesha Bhoyar, Rachit Sharma | 2022-09-13 |
| 11441992 | Method and apparatus for detection of particle size in a fluid | Mehdi Vaez-Iravani, Todd Egan | 2022-09-13 |
| 11417010 | Image based metrology of surface deformations | Mehdi Vaez-Iravani | 2022-08-16 |
| 11366069 | Simultaneous multi-directional laser wafer inspection | Sheng Liu, Ben-ming Benjamin Tsai | 2022-06-21 |
| 11287248 | Method and system for optical three dimensional topography measurement | Maarten J. van der Burgt, Sheng Liu, Andy Hill, Johan De Greeve, Karel Van Gils | 2022-03-29 |
| 11226234 | Spectrum shaping devices and techniques for optical characterization applications | Edward W. Budiarto, Todd Egan | 2022-01-18 |
| 11187654 | Imaging reflectometer | Mehdi Vaez-Iravani, Todd Egan | 2021-11-30 |
| 11156566 | High sensitivity image-based reflectometry | Mehdi Vaez-Iravani | 2021-10-26 |
| 11150078 | High sensitivity image-based reflectometry | Mehdi Vaez-Iravani | 2021-10-19 |
| 11112231 | Integrated reflectometer or ellipsometer | — | 2021-09-07 |
| 10942135 | Radial polarizer for particle detection | Jenn-Kuen Leong, Daniel Kavaldjiev | 2021-03-09 |
| 10816464 | Imaging reflectometer | Mehdi Vaez-Iravani, Todd Egan | 2020-10-27 |
| 10739275 | Simultaneous multi-directional laser wafer inspection | Sheng Liu, Ben-ming Benjamin Tsai | 2020-08-11 |
| 10670537 | Systems and methods for defect material classification | J. K. Leong, Michael D. Kirk | 2020-06-02 |
| 10634487 | Method and system for optical three dimensional topography measurement | Maarten J. van der Burgt, Sheng Liu, Andy Hill, Johan De Greeve, Karel Van Gils | 2020-04-28 |
| 10599044 | Digital lithography with extended field size | Jeremy Nesbitt, Christopher Dennis Bencher, Mehdi Vaez-Iravani | 2020-03-24 |
| 10495446 | Methods and apparatus for measuring height on a semiconductor wafer | Shifang Li | 2019-12-03 |
| 10488348 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll +2 more | 2019-11-26 |
| 10474041 | Digital lithography with extended depth of focus | Jeremy Nesbitt, Christopher Dennis Bencher, Mehdi Vaez-Iravani | 2019-11-12 |