Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12345658 | Large-particle monitoring with laser power control for defect inspection | Anatoly Romanovsky, Zhiwei Xu, Yifeng Cui, Mandar Paranjape | 2025-07-01 |
| 10495579 | System and method for compensation of illumination beam misalignment | Frank Li, Zhiwei Xu, Timothy Swisher, Kwan Auyeung | 2019-12-03 |
| 10488348 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Dirk Woll, Stephen Biellak +2 more | 2019-11-26 |
| 9915622 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Dirk Woll, Stephen Biellak +2 more | 2018-03-13 |
| 9587936 | Scanning inspection system with angular correction | Alexander Slobodov, Anatoly Romanovsky | 2017-03-07 |
| 9426400 | Method and apparatus for high speed acquisition of moving images using pulsed illumination | David L. Brown, Yung-Ho Alex Chuang | 2016-08-23 |
| 9279774 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Dirk Woll, Stephen Biellak +2 more | 2016-03-08 |
| 9091666 | Extended defect sizing range for wafer inspection | Zhongping Cai, Anatoly Romanovsky, Alexander Slobodov | 2015-07-28 |