Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810619 | Method and system for simultaneous tilt and height control of a substrate surface in an inspection system | Zhongping Cai, Jingyi Xiong, Tyler Trytko, Paul Doyle, Anatoly Romanovsky | 2017-11-07 |
| 9587936 | Scanning inspection system with angular correction | Yury Yuditsky, Anatoly Romanovsky | 2017-03-07 |
| 9091666 | Extended defect sizing range for wafer inspection | Zhongping Cai, Yury Yuditsky, Anatoly Romanovsky | 2015-07-28 |
| 8139840 | Inspection system and method for high-speed serial data transfer | Yunxian Chu | 2012-03-20 |
| 7777875 | Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation | Christian Wolters, Anatoly Romanovsky | 2010-08-17 |
| 7746462 | Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range | Zhongping Cai, Anatoly Romanovsky, Christian Wolters | 2010-06-29 |
| 7423250 | Systems, circuits and methods for extending the detection range of an inspection system by avoiding circuit saturation | Christian Wolters, Anatoly Romanovsky | 2008-09-09 |
| 7414715 | Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation | Christian Wolters, Anatoly Romanovsky | 2008-08-19 |