Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11703460 | Methods and systems for optical surface defect material characterization | Zhiwei Xu, Kurt L. Haller, J. K. Leong | 2023-07-18 |
| 10324045 | Surface defect inspection with large particle monitoring and laser power control | Steve (Yifeng) Cui, Chunsheng Huang, Chunhai Wang, Bret Whiteside, Anatoly Romanovsky +2 more | 2019-06-18 |
| 10241217 | System and method for reducing radiation-induced false counts in an inspection system | Ximan Jiang, Anatoly Romanovsky, Stephen Biellak, Mous Tatarkhanov | 2019-03-26 |
| 10215712 | Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection system | Bret Whiteside, Anatoly Romanovsky | 2019-02-26 |
| 10088345 | Haze and defect distribution and aperture configuration in surface metrology inspectors | Chuanyong Huang, Raymond Chu, Gordana Neskovic, Dieter Wilk, Tim Mahatdejkul | 2018-10-02 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Ivan Maleev +5 more | 2018-02-13 |
| 9841512 | System and method for reducing radiation-induced false counts in an inspection system | Ximan Jiang, Anatoly Romanovsky, Stephen Biellak, Mous Tatarkhanov | 2017-12-12 |
| 9678350 | Laser with integrated multi line or scanning beam capability | Jijen Vazhaeparambil, Dirk Woll, Anatoly Romanovsky, Bret Whiteside, Stephen Biellak +1 more | 2017-06-13 |
| 9255891 | Inspection beam shaping for improved detection sensitivity | Zhiwei Xu, Juergen Reich | 2016-02-09 |
| 9194812 | Illumination energy management in surface inspection | Aleksey Petrenko, Kurt L. Haller, Juergen Reich, Zhiwei Xu, Stephen Biellak +1 more | 2015-11-24 |
| 9182358 | Multi-spot defect inspection system | Zhiwei Xu, Juergen Reich, Bret Whiteside, Guoheng Zhao, Jijen Vazhaeparambil +3 more | 2015-11-10 |
| 9116132 | Surface scanning inspection system with independently adjustable scan pitch | Juergen Reich | 2015-08-25 |
| 9068952 | Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system | Aleksey Petrenko, Zhongping Cai, Anatoly Romanovsky, Bret Whiteside | 2015-06-30 |
| 8934091 | Monitoring incident beam position in a wafer inspection system | Juergen Reich, Aleksey Petrenko, Richard Fong, Bret Whiteside, Jien Cao +2 more | 2015-01-13 |
| 8885158 | Surface scanning inspection system with adjustable scan pitch | Juergen Reich | 2014-11-11 |
| 8817250 | Air bearing for substrate inspection device | Paul Doyle, Guoheng Zhao, Alexander Belyaev, J. Rex Runyon, Howard Dando +1 more | 2014-08-26 |
| 8786850 | Illumination energy management in surface inspection | Aleksey Petrenko, Kurt L. Haller, Juergen Reich, Zhiwei Xu, Stephen Biellak +1 more | 2014-07-22 |
| 8755044 | Large particle detection for multi-spot surface scanning inspection systems | Juergen Reich, Charles Amsden, Jiayao Zhang | 2014-06-17 |
| 8582094 | Systems and methods for inspecting specimens including specimens that have a substantially rough uppermost layer | David W. Shortt, Stephen Biellak | 2013-11-12 |
| 8294887 | Fast laser power control with improved reliability for surface inspection | Stephen Biellak, Daniel Kavaldjiev, George Kren, Anatoly Romanovsky | 2012-10-23 |
| 8134698 | Dynamic range extension in surface inspection systems | Anatoly Romanovsky, Daniel Kavaldjiev, Bret Whiteside | 2012-03-13 |
| 8042254 | Method for improving edge handling chuck aerodynamics | Alexander Belyaev, Aleksey Petrenko, Paul Doyle | 2011-10-25 |
| 7787114 | Systems and methods for inspecting a specimen with light at varying power levels | Jon Meyer | 2010-08-31 |
| 7777875 | Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation | Anatoly Romanovsky, Alexander Slobodov | 2010-08-17 |
| 7773212 | Contemporaneous surface and edge inspection | Anatoly Romanovsky | 2010-08-10 |