Issued Patents All Time
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9194812 | Illumination energy management in surface inspection | Christian Wolters, Aleksey Petrenko, Kurt L. Haller, Juergen Reich, Zhiwei Xu +1 more | 2015-11-24 |
| 9052190 | Bright-field differential interference contrast system with scanning beams of round and elliptical cross-sections | Ali Salehpour, Jaydeep Sinha, Kurt L. Haller, Pradeep Vukkadala, Jiayao Zhang +1 more | 2015-06-09 |
| 8786850 | Illumination energy management in surface inspection | Christian Wolters, Aleksey Petrenko, Kurt L. Haller, Juergen Reich, Zhiwei Xu +1 more | 2014-07-22 |
| 8494802 | Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer | Haiguang Chen, Daniel Kavaldjiev, Louis Vintro | 2013-07-23 |
| 8432944 | Extending the lifetime of a deep UV laser in a wafer inspection tool | Anatoly Romanovsky, Bret Whiteside | 2013-04-30 |
| 8294887 | Fast laser power control with improved reliability for surface inspection | Stephen Biellak, Daniel Kavaldjiev, Anatoly Romanovsky, Christian Wolters | 2012-10-23 |
| 8068234 | Method and apparatus for measuring shape or thickness information of a substrate | Shouhong Tang, Dieter Mueller, Brian Haas, Daniel Kavaldjiev | 2011-11-29 |
| 7505144 | Copper CMP flatness monitor using grazing incidence interferometry | Dieter Mueller, Cedric Affentauschegg | 2009-03-17 |
| 7477371 | Process and assembly for non-destructive surface inspections | Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer | 2009-01-13 |
| 7436506 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, Rodney Smedt, Hans J. Hansen, David W. Shortt, Daniel Kavaldjiev +1 more | 2008-10-14 |
| 7417724 | Wafer inspection systems and methods for analyzing inspection data | Paul Sullivan, Eliezer Rosengaus, Patrick Huet, Robinson Piramuthu, Martin Plihal +1 more | 2008-08-26 |
| 7227628 | Wafer inspection systems and methods for analyzing inspection data | Paul Sullivan, Eliezer Rosengaus, Patrick Huet, Robinson Piramuthu, Martin Plihal +1 more | 2007-06-05 |
| 7199874 | Darkfield inspection system having a programmable light selection array | Christopher F. Bevis, Paul Sullivan, David W. Shortt | 2007-04-03 |
| 7102744 | Process and assembly for non-destructive surface inspections | Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer | 2006-09-05 |
| 7009696 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, Rodney Smedt, Hans J. Hansen, David W. Shortt, Daniel Kavaldjiev +1 more | 2006-03-07 |
| 7002677 | Darkfield inspection system having a programmable light selection array | Christopher F. Bevis, Paul Sullivan, David W. Shortt | 2006-02-21 |
| 6806966 | Copper CMP flatness monitor using grazing incidence interferometry | Dieter Mueller, Cedric Affentauschegg | 2004-10-19 |
| 6781688 | Process for identifying defects in a substrate having non-uniform surface properties | Mehdi Vaez-Iravani, David W. Shortt | 2004-08-24 |
| 6686996 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, Rodney Smedt, Hans J. Hansen, David W. Shortt, Daniel Kavaldjiev +1 more | 2004-02-03 |
| 6606153 | Process and assembly for non-destructive surface inspections | Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer | 2003-08-12 |
| 6414752 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, Rodney Smedt, Hans J. Hansen, David W. Shortt, Daniel Kavaldjiev +1 more | 2002-07-02 |
| 6271916 | Process and assembly for non-destructive surface inspections | Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer | 2001-08-07 |
| 5416594 | Surface scanner with thin film gauge | Kenneth P. Gross, Christopher F. Bevis | 1995-05-16 |
| 5083035 | Position location in surface scanning using interval timing between scan marks on test wafers | Jiri Pecen, Kenneth P. Gross, Brian C. Leslie | 1992-01-21 |
| 4766324 | Particle detection method including comparison between sequential scans | Soheil Saadat, Jiri Pecen, Armand P. Neukermans | 1988-08-23 |