Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571407 | Determining information for defects on wafers | Stefano Palomba, Pavel Kolchin, Mikhail Haurylau, Robert M. Danen | 2020-02-25 |
| 10317347 | Determining information for defects on wafers | Stefano Palomba, Pavel Kolchin, Mikhail Haurylau, Robert M. Danen | 2019-06-11 |
| 10082470 | Defect marking for semiconductor wafer inspection | Steven R. Lange, Junwei Wei, Daniel L. Kapp, Charles Amsden | 2018-09-25 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Ivan Maleev +5 more | 2018-02-13 |
| 9887076 | Method and system for controlling convective flow in a light-sustained plasma | Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, Wei Zhao +2 more | 2018-02-06 |
| 9846930 | Detecting defects on a wafer using defect-specific and multi-channel information | Kenong Wu, Lisheng Gao, Grace Hsiu-Ling Chen | 2017-12-19 |
| 9558858 | System and method for imaging a sample with a laser sustained plasma illumination output | Steven R. Lange, Matthew Derstine, Kenneth P. Gross, Wei Zhao, Ilya Bezel +1 more | 2017-01-31 |
| 9552636 | Detecting defects on a wafer using defect-specific and multi-channel information | Kenong Wu, Lisheng Gao, Grace Hsiu-Ling Chen | 2017-01-24 |
| 9390902 | Method and system for controlling convective flow in a light-sustained plasma | Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, Wei Zhao +2 more | 2016-07-12 |
| 9297769 | Method for reducing aliasing in TDI based imaging | Andrew V. Hill | 2016-03-29 |
| 9092846 | Detecting defects on a wafer using defect-specific and multi-channel information | Kenong Wu, Lisheng Gao, Grace Hsiu-Ling Chen | 2015-07-28 |
| 8947521 | Method for reducing aliasing in TDI based imaging | Andrew V. Hill | 2015-02-03 |
| 8582094 | Systems and methods for inspecting specimens including specimens that have a substantially rough uppermost layer | Stephen Biellak, Christian Wolters | 2013-11-12 |
| 8060962 | Taping knife with hammer | — | 2011-11-22 |
| 7796805 | Defect detection | Michael D. Kirk, Stephen Biellak | 2010-09-14 |
| 7697129 | Systems and methods for inspecting a wafer with increased sensitivity | Kurt L. Haller, Christian Wolters | 2010-04-13 |
| 7663746 | Method and apparatus for scanning, stitching and damping measurements of a double sided metrology inspection tool | Paul Sullivan, Geroge Kren, Rodney Smedt, Hans J. Hansen, Daniel Kavaldjiev +1 more | 2010-02-16 |
| 7554656 | Methods and systems for inspection of a wafer | Stephen Biellak, Alexander Belyaev | 2009-06-30 |
| 7505619 | System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface | Evan R. Mapoles, Grace Hsiu-Ling Chen, Christopher F. Bevis | 2009-03-17 |
| 7489393 | Enhanced simultaneous multi-spot inspection and imaging | Stephen Biellak | 2009-02-10 |
| 7463349 | Systems and methods for determining a characteristic of a specimen | Stephen Biellak | 2008-12-09 |
| 7436505 | Computer-implemented methods and systems for determining a configuration for a light scattering inspection system | Alexander Belyaev, Daniel Kavaldjiev, Amith Murali, Aleksey Petrenko, Mike Kirk +2 more | 2008-10-14 |
| 7436506 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Rodney Smedt, Hans J. Hansen, Daniel Kavaldjiev +1 more | 2008-10-14 |
| 7372559 | Systems and methods for inspecting a wafer with increased sensitivity | Kurt L. Haller, Christian Wolters | 2008-05-13 |
| 7304310 | Methods and systems for inspecting a specimen using light scattered in different wavelength ranges | Christian Wolters | 2007-12-04 |